Flexible capacitive touch sensor and manufacturing method of flexible capacitive unit of flexible capacitive touch sensor

Abstract

The invention relates to a flexible capacitive touch sensor. The flexible capacitive touch sensor comprises a flexible capacitive unit and a signal processing circuit board which is electrically connected with the flexible capacitive unit, wherein the flexible capacitive unit comprises a flexible insulating medium layer, grooves matched with an upper conductive capacitor plate layer and a lower conductive capacitor plate layer in shape are formed in the upper surface and the lower surface of the flexible insulating medium layer respectively, the upper conductive capacitor plate layer is embedded in the groove formed in the upper surface of the flexible insulating medium layer, and the lower conductive capacitor plate layer is embedded in the groove formed in the lower surface of the flexible insulating medium layer. The invention further discloses a manufacturing method of the flexible capacitive touch sensor. The flexible capacitive touch sensor can not only detect the magnitude of three-dimensional force but also have good overall flexibility, structural design lowers difficulty of solving the three-dimensional force, and the flexible capacitive touch sensor can meet the requirement for real-time detection. Besides, the flexible capacitive touch sensor is compact in structure and strong in integrality, thereby working stably and being convenient to use, good in adaptability and wide in application range.

Description

technical field [0001] The invention relates to the technical field of sensor preparation, in particular to a flexible capacitive touch sensor and a method for preparing a flexible capacitive unit thereof. Background technique [0002] Tactile sense is an important form of perception for robots to obtain environmental information, and it is a necessary medium for robots to directly interact with the environment. It has strong sensitivity and can directly measure various properties of objects and environments. There are many kinds of commonly used robot tactile sensors, which are mainly divided into piezoresistive, piezoelectric, capacitive, optical sensor, magnetic sensor, ultrasonic sensor and mechanical sensor according to different sensitive mechanisms. An ideal tactile sensor, in addition to the requirements of low cost, simple preparation and strong durability, must also have the characteristics of simultaneous three-dimensional force detection and good flexibility. Es...

AI Technical Summary

Problems solved by technology

The announcement number is CN101059380A, and the patent name is "a method for manufacturing a flexible capacitive tactile sensor". The PDMS intermediate layer is used to prepare a flexible PI substrate, a patterned metal sensitive electrode and a PI insulating protective layer, realizing organic flexibility. The material is compatible with the traditional MEMS process, and the capacitive tactile sensor produced has good flexibility and can feel the magnitude of tangential force and normal force at the same time; however, since the sensitive electrode of the sensor still uses Al or Cr / Au metal film, When the curvature of the surface to be attached is large, large errors will be caused by the difference in elastic modulus between the electrode and the medium, and true full flexibility has not yet been achieved.

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