A polysilicon reduction furnace water system heat energy recovery system and process

Abstract

The invention discloses a heat energy recovery system and technology of a water system of a polycrystalline silicon reducing furnace. The heat energy recovery system comprises a reducing furnace, a tail gas cooler, a centralized flash evaporation tank, a hot water circulating pump and a tail gas jacket pipe, wherein a furnace cylinder of the reducing furnace 1, a chassis and the tail gas cooler are respectively connected with respective main pipes and then connected with a water return port on the same side of the upper part of the centralized flash evaporation tank respectively; a gas outlet at the upper part on the other side of the centralized flash evaporation tank is connected with a steam pipe network; the centralized flash evaporation tank is connected with the hot water circulating pump; one hot water circulating pump is in use, and another one is standby; the hot water circulating pump is connected with a high-temperature water inlet main pipe and connected with a furnace cylinder water inlet pipe orifice of each reducing furnace, a chassis water inlet pipe orifice, a tail gas cooler tube pass water inlet and a tail gas jacket pipe water inlet respectively; 2-3bar.g steam is flash-evaporated; part of the heat of the water at 150-160 DEG C is converted into the latent heat of vaporization of the 2-3bra.g steam so as to reduce the temperature of the water to obtain saturated water at 130-140 DEG C.

Description

Technical field: [0001] The invention relates to a heat energy recovery system and process of a reduction furnace water system in polysilicon production, belonging to the field of solar photovoltaics. Background technique: [0002] In recent years, the domestic polysilicon production technology has developed rapidly. The main process technology for polysilicon production at home and abroad is the "Siemens improved method". In the "Siemens improved method", more than 50% of the energy consumption is in the reduction furnace. In the past, people used Focus on the power consumption of the reduction furnace, but the reaction itself does not need so much energy during the growth process of the reduction furnace, but the start and maintenance temperature of the reaction is relatively high, around 1080-1100 degrees, and most of the heat is carried away by cooling water. Most of the process improvements are only aimed at the recovery and reuse of hot exhaust gas, and there are few ...

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Problems solved by technology

[0004] The invention mainly solves the recovery and reuse of the heat energy of the water system in the production process of the improved Siemens method polysilicon reduction furnace

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