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A two-way sliding wedge prism focusing device

A technology of focusing device and sliding wedge, which is applied in the field of photolithography, can solve the problems of unsatisfactory, time-consuming, laborious, and expensive, etc., and achieve the effects of small motor stroke, wide application range, and large focusing range

Active Publication Date: 2017-04-05
TIANJIN JINXIN MICROELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This focusing method cannot meet the 0.025mm-5mm PCB board thickness products on the market
When changing products with different PCB board thicknesses, it is necessary to add a suction cup backing plate to reach the position of the exposure focal plane, which is time-consuming, laborious, and costly.

Method used

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  • A two-way sliding wedge prism focusing device
  • A two-way sliding wedge prism focusing device
  • A two-way sliding wedge prism focusing device

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Embodiment Construction

[0015] In order to make the purpose, technical solutions and beneficial effects of the present invention more clear, the present invention will be further described in detail below in conjunction with the examples. It should be understood that the specific embodiments described here are only used to explain the present invention, and are not intended to limit the protection scope of the present invention.

[0016] like figure 1 , figure 2 , image 3 , Figure 4 as shown, figure 1 It is a schematic diagram of the front structure of the present invention; figure 2 It is a schematic diagram of the back structure of the present invention; image 3 Schematic diagram of the structure where the upper and lower wedge prisms move to the thinnest intersection; Figure 4 Schematic diagram of the structure where the upper and lower wedge prisms move to the thickest intersection. The upper prism structure 11 described in the present invention includes an upper prism and an upper p...

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Abstract

The invention discloses a two-way sliding wedge prism focusing device, comprising: a prism and a power mechanism, the prism includes a wedge-shaped upper prism and a wedge-shaped lower prism, the inclined surface of the upper prism is in contact with the inclined surface of the lower prism , the power mechanism is connected with the upper prism and the lower prism, and drives the upper prism and the lower prism to slide synchronously along the direction of the inclined surface. The beneficial effect of the present invention is that, compared with the prior art, the present invention has simple and compact structure, small motor stroke, large focusing range, real-time focusing according to the focal plane, and wider application range.

Description

technical field [0001] The invention belongs to the technical field of photolithography, and in particular relates to a bidirectional sliding wedge prism focusing device. Background technique [0002] Photolithography is the technique used to print a pattern of features on the surface of a substrate. Such substrates may include chips used in the fabrication of semiconductor devices, various integrated circuits, flat panel displays (eg, liquid crystal displays), circuit boards, biochips, micromechanical electronic chips, optoelectronic circuit chips, and the like. In the lithography system of the direct-write lithography machine, the feature pattern is generated by the micromirror array of the spatial light modulator. These tiny mirrors can be independently addressed and individually controlled to reflect the irradiated beam in different oblique directions to produce spatial light intensity. Finally, the characteristic graphics are projected onto the PCB board through the co...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G02B7/18
Inventor 王维娟陈勇刘宝金
Owner TIANJIN JINXIN MICROELECTRONICS TECH CO LTD