Mechanical autorotating MOCVD (metalorganic chemical vapor deposition) accessory substrate tray

A mechanical, tray technology, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problem of inability to ensure the uniform height of the substrate tray, and achieve the effect of avoiding floating above the substrate

Inactive Publication Date: 2014-02-05
北京希睿思科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in the suspended state, it is bound to be impossible to ensure that the rotation speed of the substrate tray remains highly uniform.

Method used

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  • Mechanical autorotating MOCVD (metalorganic chemical vapor deposition) accessory substrate tray
  • Mechanical autorotating MOCVD (metalorganic chemical vapor deposition) accessory substrate tray
  • Mechanical autorotating MOCVD (metalorganic chemical vapor deposition) accessory substrate tray

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Embodiment Construction

[0026] The present invention will be further described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.

[0027] Such as figure 2 As shown, the mechanical self-rotating MOCVD sub-substrate tray provided by the present invention includes: a substrate placement tray 3 on which a substrate to be deposited by vapor phase is placed. Such as image 3 As shown, a substrate 54 is placed on the substrate holding tray 3 . image 3 A plurality of substrates 54 are arranged in each substrate placement tray 3 in image 3 There are 7 of them.

[0028] Substrate gear 55, such as image 3 As shown, the tooth lines drawn on the edge of the substrate placing tray represent the gears located under the substrate placing tray.

[0029] The substrate gear 55 is fixed below the substrate placement tray 3 . A first driving mechanism, which drives the substrate gear to rotate in a first direction,...

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PUM

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Abstract

The invention discloses a mechanical autorotating MOCVD (metalorganic chemical vapor deposition) accessory substrate tray which comprises a substrate placed plate, a substrate gear and a first drive mechanism, wherein a substrate to be subjected to vapor deposition is placed on the substrate placed plate; the substrate gear is fixedly connected below the substrate placed plate; the first drive mechanism drives the substrate gear to rotate along a first direction, and the substrate gear drives the substrate placed plate to rotate. The mechanical autorotating MOCVD accessory substrate tray disclosed by the invention breaks a prejudice of thinking that the substrate placed plate can not be driven by a gear, but can be driven by an air flow in the prior art. According to the invention, the substrate placed plate is running more smoothly under the driving of the gear, so that the effect of vapor deposition is better.

Description

technical field [0001] The invention relates to the technical field of vapor deposition, in particular to a mechanical self-rotating MOCVD secondary lining tray. Background technique [0002] Vapor deposition is the use of physical and chemical processes occurring in the gas phase to form functional or decorative metal, non-metal or compound coatings on the surface of the substrate. The common vapor deposition is MOCVD, which is metal organic compound chemical vapor deposition. In order to make vapor deposition more uniform and improve the quality of deposition, the tray carrying the substrate needs to rotate evenly. The uniformity of the temperature of the tray and the uniformity of the rotation are both important factors affecting the uniformity of the epitaxial growth sheet formed by the substrate through vapor deposition. However, in the prior art, an airflow channel is provided under the tray to allow the airflow to drive the tray to rotate. Therefore, the stability ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/458
Inventor 金英镐金相模
Owner 北京希睿思科技有限公司
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