Cleaning head

Abstract

A cleaning head comprises: a long internal pipeline (150) which supplies a cleaning gas to a gas injection chamber (170) from outside via a gas supplying pipeline (100), so that the cleaning gas injects from a gas jet orifice (153a); a lower cover (110) arranged to surround the internal pipeline (150); an upper cover (210) which is connected with an upper end part of the lower cover (110) and in which an air storing part (220) is communicated with an exhaust pipeline (200);and a sliding guide part (161) for enabling the two covers (110, 210) to slide relatively along a length direction, so as to connect the two covers, wherein a gas absorbing chamber (180) communicated with a gas absorbing opening (154a) is formed between an internal surface of the lower cover (110) and an external surface of the internal pipeline (150), the gas absorbing chamber (180) is communicated with the air storing part (220) by utilizing exhaust ports (121-124) which have larger opening areas when being farther from the exhaust pipeline (200).

Description

technical field [0001] The present invention relates to a cleaning head for spraying a cleaning gas onto the surface of a dust-removing object such as a glass substrate, a metal substrate, or a resin film to scatter and suck away dust adhering to the surface. Background technique [0002] image 3 (a)~(c) represent the prior art of this cleaning head, image 3 (a) is the top view of the head body, image 3 (b) is the front view of the whole, image 3 (c) is image 3 (b) B-B enlarged cross-sectional view. [0003] In these drawings, 20 is a square tube-shaped head main body, and the air supply duct 10 is respectively attached to both ends. Such as image 3 As shown in (a), on the top plate 21 of the head main body 20 , a pair of exhaust ports 20 b are formed at approximately equal intervals along the longitudinal direction. [0004] exist image 3 (b), image 3 In (c), 31, 32, 33 correspond to the exhaust port 20b, and are exhaust ducts symmetrically installed on both sides ...

AI Technical Summary

Problems solved by technology

However, even with such a structure, the closer to the longitudinal center of the head main body 20, the weaker the suction force of the gas is, or the suction force varies, and sufficient dust removal performance cannot be obtained.

In addition, the shapes and structures of the exhaust ducts 31, 32, 33 and the hoses 41, 42 are of various types, and the overall number of parts is also large, so there is a problem that the manufacturing cost increases.

[0015] In addition, the screws 35 that fix the exhaust ducts 31, 32, 33 to the top plate 21 of the head body 20 may become loose due to vibration. In the worst case, the screws 35 may fall on the dust removal object G and be damaged. Dust removal target G or situations that cause contamination

[0016] And, dust is easy to adhere to the concave-convex part of components such as exhaust duct 31,32,33 and hose 41,42, also exists the situation that these dusts fall to the surface of object G of dust removal.

Images