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Variable wavelength interference filter, optical filter device, optical module, electronic apparatus

An interference filter, a variable technology, applied in the direction of instruments, optics, optical components, etc., can solve the problem that it is difficult to design the driving range of the reflective film, the capacitance characteristics of the electrostatic capacitance tester, the degree of freedom of the capacitance characteristics is low, and it is not easy to solve the problem, etc. , to achieve the effects of improved accuracy, improved design freedom, and reduced parasitic capacitance

Inactive Publication Date: 2014-02-12
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the variable wavelength interference filter of Patent Document 1, since the parameter that can be designed is one (the effective area of ​​the capacitive electrode), it is difficult to design the capacitive characteristics corresponding to the driving range of the reflective film and the input range of the capacitance measuring device
[0009] In recent years, it has been a problem to improve the accuracy of controlling the gap amount of the gap between reflective films. However, in the variable wavelength interference filter of Patent Document 1, since there is only one parameter that can be designed, the degree of freedom in designing capacitance characteristics is low. It is not easy to solve the problem

Method used

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  • Variable wavelength interference filter, optical filter device, optical module, electronic apparatus
  • Variable wavelength interference filter, optical filter device, optical module, electronic apparatus
  • Variable wavelength interference filter, optical filter device, optical module, electronic apparatus

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no. 1 approach

[0063] Hereinafter, a first embodiment according to the present invention will be described based on the drawings.

[0064] [Structure of spectrometer]

[0065] figure 1 It is a block diagram showing a schematic configuration of the spectrometry device according to the first embodiment of the present invention.

[0066] The spectrometer 1 is an electronic device according to the present invention, and analyzes the light intensity of a predetermined wavelength of the measurement object light reflected by the measurement object X to measure a spectral spectrum.

[0067] like figure 1 As shown, this spectrometer 1 includes an optical module 10 , a probe 11 (detection unit), an I-V converter 12 , an amplifier 13 , an A / D converter 14 , and a control unit 20 . Furthermore, the optical module 10 is configured to include a variable wavelength interference filter 5 and a voltage control unit 15 .

[0068] The detector 11 receives light transmitted through the wavelength-variable i...

no. 2 approach

[0214] Next, a second embodiment of the present invention will be described based on the drawings.

[0215] In the first embodiment and the second embodiment, the formation positions of the grooves are different.

[0216] In the variable wavelength interference filter 5 of the first embodiment described above, the third groove 513 , the second groove 512 , and the first groove 511 are formed in this order from the outside in plan view of the filter.

[0217] In contrast, in the variable wavelength interference filter according to the second embodiment, the second groove 512 , the third groove 513 , and the first groove 511 are formed in this order from the outside when the filter is viewed from above.

[0218] In addition, in the following description, the same code|symbol is attached|subjected to the same structure as 1st Embodiment, and the description is abbreviated or abbreviate|omitted.

[0219] Figure 8 It is a plan view showing a schematic configuration of a variable...

no. 3 approach

[0234] Next, an optical filter device according to a third embodiment of the present invention will be described.

[0235] In the spectrometry apparatus 1 of the first embodiment described above, the variable wavelength interference filter 5 is provided directly on the optical module 10 . However, the optical module may have a complicated structure, and especially in a downsized optical module, it may be difficult to directly install the variable wavelength interference filter 5 . In this embodiment, an optical filter device capable of easily installing the variable wavelength interference filter 5 in such an optical module will be described.

[0236] Figure 10 It is a cross-sectional view showing a schematic configuration of an optical filter device according to a third embodiment of the present invention.

[0237] like Figure 10 As shown, the optical filter device 600 includes a variable wavelength interference filter 5B and a housing 601 for accommodating the variable ...

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Abstract

A variable wavelength interference filter (5, 5A) includes a stationary substrate (51, 51A) and a movable substrate (52) opposed to each other, the stationary substrate includes a stationary reflecting film (541), a first drive electrode (551), and a first capacitance detecting electrode (561), and the movable substrate includes a movable reflecting film (542) arranged to have an inter-reflecting film gap (G1) with the stationary substrate, a second drive electrode (552) arranged to have an inter-drive electrode gap (G2) with the first drive electrode, and a second capacitance detecting electrode (562) arranged to have an inter-capacitance detecting electrode gap (G3) with the first capacitance detecting electrode. The capacitance detecting electrodes are the electrodes for detecting the capacitance between the electrodes. The gap amount of the inter-reflecting film gap is changed by the drive electrodes. The gap amount of the inter-reflecting film gap, the gap amount of the inter-drive electrode gap, and the gap amount of the inter-capacitance detecting electrode gap are different from each other.

Description

technical field [0001] The invention relates to a variable wavelength interference filter, an optical filter device, an optical module, an electronic device and a manufacturing method of a variable wavelength interference filter. Background technique [0002] Conventionally, there is known a variable wavelength interference filter in which light of a predetermined target wavelength is extracted through two reflecting films facing each other, and the size of the gap between the two reflecting films is changed to The wavelength of the extracted light is changed. [0003] For example, Patent Document 1 describes a variable wavelength interference filter in which a pair of capacitive electrodes are formed on opposing surfaces of two optical substrates, and an actuator is controlled based on the detection capacitance (capacitance) of the pair of capacitive electrodes. , so that the distance between the optical substrates becomes a predetermined target distance. In the variable ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/00G02B5/28G01R27/26
CPCG02B26/001B26D3/06G01B7/003G01J3/26Y10T83/0304
Inventor 广久保望
Owner SEIKO EPSON CORP