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A Two-Wavelength Simultaneous Phase Shift Interferometry Method Based on Monochromatic CCD

A technology of phase shift interference and measurement method, applied in the field of optical interferometry and digital holographic measurement, can solve the problems of measurement result error, etc., and achieve the effect of high precision, large measurement range and satisfying sampling conditions

Active Publication Date: 2017-03-15
SOUTH CHINA NORMAL UNIVERSITY
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Problems solved by technology

This method needs to take two pictures, and the piezoelectric ceramic (PZT) micro-displacement device is used for phase shifting in two times. Due to the influence of PZT nonlinearity, creep and other characteristics, it will inevitably bring errors to the measurement results.

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  • A Two-Wavelength Simultaneous Phase Shift Interferometry Method Based on Monochromatic CCD
  • A Two-Wavelength Simultaneous Phase Shift Interferometry Method Based on Monochromatic CCD
  • A Two-Wavelength Simultaneous Phase Shift Interferometry Method Based on Monochromatic CCD

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Embodiment Construction

[0040] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.

[0041] In order to make it easier for the optical path to meet the monochromatic CCD sampling conditions, the first embodiment adopts a dual-wavelength phase-shift coaxial Mach-Zehnder interferometric optical path system. figure 1 It can be seen that the optical path system includes three parts: a phase shift system composed of a light source, a piezoelectric ceramic micro-displacer (PZT) and a computer (PC), a monochrome CCD and a data acquisition card, and an image acquisition system composed of a PC. The light source part is composed of a He-Ne laser with a wavelength of 633nm and a semiconductor-pumped solid-state laser with a wavelength of 532nm. The monochromatic CCD (charge coupled device) in the image acquisition part is the MTV-1802CB black and white low-light high...

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Abstract

The invention discloses a dual-wavelength simultaneous phase-shifting interference measurement method based on a monochromatic CCD. The monochromatic CCD is used to simultaneously collect a dual-wavelength mixed phase-shift interference fringe pattern through a phase-shifting method. From the collected dual-wavelength mixed phase-shifted interference fringe pattern Two single-wavelength wrapping phases are extracted respectively, and then the synthetic wavelength phase is calculated by subtracting the two single-wavelength wrapping phases, and the synthetic wavelength phase information is obtained. The phase information under the synthetic wavelength is a continuous phase distribution, reflecting the measured The real three-dimensional shape of the surface of the object. The present invention only needs to perform a phase shift on the mixed interference fringe pattern once, and does not need to carry out phase shifts on the two wavelengths respectively, and can be applied to the three-dimensional topography measurement of the microstructure surface with abrupt changes such as steps and grooves; the measurement method is simple , Large measurement range, high precision, real-time and efficient measurement.

Description

technical field [0001] The invention relates to the fields of optical interferometry and digital holographic measurement, in particular to a dual-wavelength simultaneous phase-shift interferometry method of a monochrome CCD. Background technique [0002] Digital holographic interferometry is a new type of holographic imaging measurement method that has attracted much attention in the field of precision measurement. With the continuous development and wide application of micro-structural devices such as micro-optical components, semiconductor devices, and micro-opto-electromechanical systems, these fields urgently need a high-precision, high-resolution, non-destructive, real-time and fast measurement method for surface structures (such as : Area contour, defect hole, protrusion, crack, surface error, etc.) for measurement. The three-dimensional surface topography detection method based on digital holographic interferometry is an important means to obtain the surface morpholo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
Inventor 吕晓旭张望平费蕾寰赵晖钟丽云
Owner SOUTH CHINA NORMAL UNIVERSITY
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