A system and a method for raising the efficiency of a WAT test

Abstract

The invention discloses a method for raising the efficiency of a WAT test, and is applied to a WAT test machine. The method comprises the following steps: information of devices of various kinds of structures is acquired in advance; arrangement of the information is carried out; the arranged information is stored in the WAT test machine; corresponding test methods and test conditions are set in advance according to test purposes of the devices of the various kinds of structures; the test methods and the test conditions are arranged, and the arranged test methods and test conditions are stored in the WAT test machine; and when the WAT test machine tests to-be-tested devices, the information corresponding to the to-be-tested devices in the WAT test machine is called, and testing is carried out on the to-be-tested devices. The invention also provides a system which raises the efficiency of the WAT tests. Through the adoption of the technical scheme of the present invention, time spent on acquiring information, selecting the test method and selecting the test conditions is saved, and the efficiency of the WAT tests is raised.

Description

technical field [0001] The present invention relates to the field of microelectronic technology, in particular to a system and method for improving the efficiency of WAT test (Wafer Acceptance Test, wafer acceptance test). Background technique [0002] With the increasingly complex integrated circuit processing technology, more and more parameters need to be tested during the WAT test (Wafer Acceptance Test) of integrated circuits. Especially in the development of new products, the test parameters often amount to thousands or even tens of thousands of items. [0003] In the existing WAT test, the conventional method is to collect the information of the device structure each time during the test and select the test conditions and test methods according to the test purpose of the device, so it will delay more time in large-scale mass production, resulting in The problem of low efficiency of WAT testing. [0004] Chinese patent (publication number: CN103336257A) discloses a W...

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Problems solved by technology

[0007] In view of the above existing problems, the present invention discloses a system and method for improving WAT test efficiency, so as to overcome the WAT test in the prior art and need to collect the information of the device structure every time and select the test conditions and test methods according to the test purpose of the device, so In large-scale mass production, more time will be delayed, which will cause the problem of low efficiency of WAT testing

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