Electronic biosensors based on single charge detection
An electronic sensor and base technology, applied in the field of electronic sensors, can solve problems such as harmful signal noise and achieve the effect of high sensitivity
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[0021] The electronic sensor 10 according to the invention is in figure 1 Schematically shown in , the electronic sensor includes a combined MOSFET and BJT, as shown in the superimposed schematic circuit diagram in the figure. refer to figure 1 , starting from the bottom, the sensor device comprises a silicon substrate as an anode layer 15 of conventional type. The substrate 15 preferably has a (100)-crystal orientation. In the second embodiment of the present invention, the substrate 15 may also be a silicon-on-insulator (SOI) substrate. Substrate 15 may also be a SiC or Ge substrate. On top of the anode 15, a vertical pnp transistor (Bipolar Junction Transistor - BJT) is formed by a first p+ layer 20 with a typical thickness of about 1 μm and a typical dopant concentration of 3×10 19 cm -3 ; n-region 25 with a typical thickness of about 3 μm and a typical dopant concentration of 10 16 cm -3 ; p-region 30 with a typical surface concentration of 4 × 10 17 cm -3 . Her...
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