Laser spectrum analyzer combining confocal micro-Raman spectrometer with laser-induced breakdown spectrometer

A laser-induced breakdown and confocal microscopy technology, applied in the field of elemental analysis and material structure analysis, material element and molecular structure analysis, which can solve the problems such as the inability to measure the molecular structure of the sample and the inability to measure the elements.

Active Publication Date: 2014-04-23
东莞市中科原子精密制造科技有限公司
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Problems solved by technology

LIBS spectrometer can measure material elements but not sample molecular structure
[0003] Raman spectroscopy (Raman) can reveal the vibrational modes of molecules and crystals of organic and i

Method used

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  • Laser spectrum analyzer combining confocal micro-Raman spectrometer with laser-induced breakdown spectrometer
  • Laser spectrum analyzer combining confocal micro-Raman spectrometer with laser-induced breakdown spectrometer
  • Laser spectrum analyzer combining confocal micro-Raman spectrometer with laser-induced breakdown spectrometer

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Embodiment Construction

[0027] Laser confocal microscope Raman and LIBS combined spectrum analyzer, the instrument includes micro LIBS system, micro Raman system, micro imaging system and confocal laser transmission and spectrum receiving system.

[0028] The device uses an incandescent lamp to illuminate the sample, uses CCD image processing to determine the focal plane from the sample to the microscope objective lens, and images the sample surface at a micron scale with high resolution.

[0029] The device uses 532nm or 785nm continuous laser as Raman excitation light source.

[0030] The device uses 1064nm pulsed laser as LIBS excitation light source.

[0031] Such as figure 1 , figure 2 Shown, the workflow of the present invention is as follows:

[0032] Turn on the program control all-in-one machine 22, turn on the incandescent lamp 11, adjust the microscopic objective lens 18 and the precise three-dimensional moving stage 19, stop the adjustment until the image of the sample on the CCD16 is...

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Abstract

The invention provides a laser spectrum analyzer combining a confocal micro-Raman spectrometer with a laser-induced breakdown spectrometer (LIBS). The analyzer comprises a micro-Raman system, a micro LIBS system, a high resolution micro-imaging system, a confocal micro-light path, and a spectrum receiving system with a time resolution function, and automatically switches into a white light micro-imaging observation mode, an automatic focusing mode, a LIBS spectrum working mode, and a Raman spectrum working mode. The significant characteristics of the invention are that compact combination of Raman with LIBS is realized by a micro confocal system; qualitative and quantitative analysis of substance elements at the same minimal position and molecular structure is realized; with the high-resolution imaging function, element spatial discrimination and substance structure chemical analysis can be carried out in micrometers so as to obtain complete information of spatial distribution images of chemical elements, substance structure and physical conditions of a sample.

Description

technical field [0001] The invention relates to the field of material element and molecular structure analysis, in particular to the field of elemental analysis and material structure analysis in which the same point of a sample to be measured is spatially resolved on a micron scale by using a spectral analysis method. Background technique [0002] In recent years, laser-induced plasma spectroscopy (LIBS for short) has become a new elemental analysis technique due to its advantages of high sensitivity, no need for sample pretreatment, and realization of multi-element measurement. It has the advantages of real-time, rapid, on-site in-situ detection and multi-element simultaneous detection, without sample preparation, etc. It can perform chemical analysis on solid, liquid, gas and other substances in various forms. LIBS spectrometers can measure material elements but not sample molecular structures. [0003] Raman spectroscopy (Raman) can reveal the vibrational modes of molec...

Claims

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Application Information

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IPC IPC(8): G01N21/65G01N21/63
Inventor 朱香平张文松汤洁赵卫段忆翔豆西博
Owner 东莞市中科原子精密制造科技有限公司
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