Internet of Things RF Transceiver Component Fixed Fishbone Beam Vibration Electromagnetic Self-Powered Microsensor

Abstract

The invention discloses a clamped fishbone beam vibrating electromagnetic self-powered microsensor of a radio frequency transceiving component of an internet of things. The clamped fishbone beam vibrating electromagnetic self-powered microsensor is characterized in that a gallium arsenide substrate (1) serves as the substrate, silicon nitride (2) of anchoring areas at two ends of a clamped beam (3) is fixed on the gallium arsenide substrate (1) respectively, three pairs of cantilever beams (4) are arranged on two sides of the clamped beam (3), the middle pair of the cantilever beams (4) is longer than the other side pairs equal in length, and a rectifying circuit (11), a first large capacitor (12), a second large capacitor (13), a first voltage stabilizing circuit (14) and a second voltage stabilizing circuit (15) are arranged around the clamped fishbone beam vibrating electromagnetic self-powered microsensor. The problem about self-powering of low-power apparatuses in the radio frequency transceiving component is solved, vibrating energy collection in a wide band range can be achieved, efficiency of the self-powered microsensor is improved, shaking of a system structure is restrained, and furthermore, electromagnetic compatibility of the radio frequency transceiving component is improved.

Description

technical field [0001] The invention provides a fishbone beam vibration / electromagnetic self-powered microsensor fixed to a radio frequency transceiver component of the Internet of Things, and belongs to the technical field of radio frequency microelectromechanical systems (RFMEMS). Background technique [0002] The Internet of Things is an important part of the new generation of information technology. It uses communication technologies such as local networks or the Internet to connect sensors, controllers, machines, people, and things together in new ways to form a connection between people and things, and between things and things. , realize informatization, remote management control and intelligent network. With the rapid development of the Internet of Things, while bringing convenience to people's lives, it also poses challenges to science and technology. Although the current microelectronic products of various sensors have made great progress in small size and low ene...

AI Technical Summary

Problems solved by technology

Although the current microelectronic products of various sensors have made great progress in small size and low energy consumption, the development of corresponding micro energy technology is relatively lagging behind.

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