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Micro-electronic gyro device

A technology of gyroscopes and micro-electromechanical systems, which can be used in measuring devices, gyroscopes/steering sensing equipment, and gyro effects for speed measurement, etc., and can solve problems such as unsatisfactory technologies

Inactive Publication Date: 2014-06-04
TRONICS MICROSYST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0014] Existing techniques are not ideal for suppressing measurement disturbances

Method used

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  • Micro-electronic gyro device
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Experimental program
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Embodiment Construction

[0091] figure 1 Preferred embodiments of the present invention are shown. There is a first mobile mass 1 and a second mobile mass 2 . The first mass 1 is basically a disc. In this embodiment the disc has an opening 3 in the center. The radius R1 of the disc may be in the range of 0.1 mm to 3 mm. The second mass 2 is annular and surrounds the first mass 1 . The inner radius R4 of the second mass 2 may be in the range of 0.12 mm to 4 mm, and the outer radius R5 may be in the range of about 0.2 mm to 6 mm. The second mass 2 completely surrounds the first mass 1 .

[0092] The two masses are mechanically connected by four Z-shaped coupling elements 4,5,6,7. They are all the same. Therefore, only the coupling element 4 is referred to in the following description.

[0093] The coupling elements 4 are supported on posts 8.1 (anchor points) of the substrate. The post 8.1 acts as a point anchor for the coupling element 4 . It supports the coupling element 4 at a distance abo...

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Abstract

A resonator micro-electronic gyro, preferably a micro-electromechanical system (MEMS) gyro comprises a first and a second resonator mass (1, 2) suspended for rotational vibration. The two masses (1, 2) are flexibly connected by four mechanical coupling elements (4, 5, 6, 7) for anti-phase vibration. There is at least one positive and at least one negative sensing electrode (S11+, S11-, S21+, S21-) on each resonator mass (1, 2) for detecting an out-of-plane output movement of the masses (1, 2). A detection circuit is connected to be said positive and negative sensing electrodes and determines the output signal by differential detection of the signals on the basis of the following formula: Sxout = ({S21 +} - M{S 11 +}) - ({S21-} - M{S 11-}), wherein {S21+}, {S21-} sensing electrode signals of the positive and negative detection electrode of the second mass, respectively; {S11+}, {S11-} sensing electrode signals of the positive and negative detection electrode of the first mass, respectively, mu = compensation factor.

Description

technical field [0001] The invention relates to a method for detecting an output signal of a resonator microelectronic gyroscope, preferably a microelectromechanical system (MEMS) gyroscope, comprising the following steps: [0002] a) activating the vibrating in-plane motion of the first and second resonator masses suspended for rotational vibration, [0003] b) Anti-phase vibration of the first and second vibrating masses is provided by at least one mechanical coupling element elastically connecting the first and second resonator masses to vibrate in anti-phase. [0004] The invention also relates to a resonator microelectronic gyroscope comprising: [0005] a) suspending the first and second resonator masses for rotational vibration, [0006] b) at least one mechanical coupling element elastically connecting the first and second resonator masses to vibrate in antiphase, [0007] c) at least one positive sense electrode and at least one negative sense electrode in each res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5712
CPCG01C19/5712
Inventor 雅克·勒克莱克
Owner TRONICS MICROSYST