[0047] The basic idea of the present invention is: the substrate detection device includes: a detection sensor, at least one detection module, a control module, and at least one adjustment module; wherein the detection sensor is used to detect the substrate; the detection module is used to detect The level of the detection sensor; the control module is used to control the adjustment module to adjust the level according to the detection result of the detection module.
[0048] The embodiment of the present invention provides a detection sensor adjustment device, including: at least one detection module, a control module, and at least one adjustment module; wherein,
[0049] The detection module is used to detect the levelness of the detection sensor;
[0050] The control module is configured to control the adjustment module to adjust the level of the detection sensor according to the detection result of the detection module.
[0051] Optionally, the device specifically includes two detection modules and three adjustment modules, respectively: a first detection module, a second detection module, a first adjustment module, a second adjustment module, and a third adjustment module; wherein,
[0052] The first detection module is used to detect the levelness of the detection sensor in one direction;
[0053] The second detection module is configured to detect the horizontality of the detection sensor in another direction perpendicular to the direction detected by the first detection module;
[0054] The first adjustment module, the second adjustment module, and the third adjustment module are respectively used to adjust the corresponding level according to the control of the control module.
[0055] Optionally, the detection module is a liquid level detector.
[0056] Optionally, the liquid level detector is a container filled with liquid, at least two pressure sensors are provided at the bottom of the container, and the control module is specifically configured to detect the pressure according to the pressure sensor in the liquid level detector. Value, control the adjustment module to adjust the level; or,
[0057] The liquid level detector is a bubble type liquid level detector, and the control module is specifically configured to control the adjustment module to adjust the level according to the position of the bubble in the liquid level detector.
[0058] Optionally, the control module is also used to control the adjustment module to perform rapid adjustment when the detection value of the detection module or the calculated value based on the detection value is not less than a preset threshold; When the calculated value of is less than the preset threshold, the control and adjustment module is controlled to adjust slowly;
[0059] The adjustment module adjusts the level through a motor or air pressure.
[0060] An embodiment of the present invention also provides a substrate detection device, which includes: a detection sensor and a detection sensor adjustment device; wherein the detection sensor is used for detecting a substrate; the detection sensor adjustment device is the above Detection sensor adjustment device. Specific, such as figure 1 As shown, the substrate detection device includes: a detection sensor 1, at least one detection module 2, a control module 3, and at least one adjustment module 4; wherein,
[0061] The detection sensor 1 is used to detect the substrate;
[0062] The detection module 2 is used to detect the levelness of the detection sensor 1;
[0063] The control module 3 is used for controlling the adjustment module 4 to adjust the level according to the detection result of the detection module 2.
[0064] Optional, such as figure 2 As shown, the device specifically includes two detection modules and three adjustment modules, namely: a first detection module 21, a second detection module 22, a first adjustment module 41, a second adjustment module 42, and a third adjustment module 43; Among them, the first detection module 21 is used to detect the horizontality of one direction of the detection sensor 1; the second detection module 22 is used to detect the horizontality of the other direction of the detection sensor 1 perpendicular to the direction detected by the first detection module 21 The first adjustment module 41, the second adjustment module 42, and the third adjustment module 43 are respectively used to adjust the corresponding level according to the control of the control module 2.
[0065] It should be noted that if the substrate inspection device contains only one inspection module, then the inspection module performs the functions of the first inspection module 21 and the second inspection module 22. If the substrate inspection device contains only one adjustment module, then The adjustment module performs the functions of the first adjustment module 41, the second adjustment module 42 and the third adjustment module 43.
[0066] Optionally, the detection module 2 is a liquid level detector.
[0067] Optionally, the liquid level detector is a container filled with liquid, and at least two pressure sensors are provided at the bottom of the container;
[0068] The control module 3 is specifically configured to control the adjustment module 4 to adjust the level according to the pressure value detected by the pressure sensor in the liquid level detector.
[0069] Optionally, the liquid level detector is a bubble type liquid level detector;
[0070] The control module 3 is specifically configured to control the adjustment module 4 to adjust the level according to the position of the bubble in the liquid level detector.
[0071] Optionally, the control module 3 is also used to control the adjustment module 4 to perform rapid adjustment when the detection value of the detection module 2 or the calculated value based on the detection value is not less than a preset threshold; When the calculated value of the detection value is less than the preset threshold value, the control and adjustment module 4 is slowly adjusted.
[0072] Optionally, the adjustment module 4 adjusts the level through a motor or air pressure.
[0073] To figure 2 The illustrated substrate inspection device is taken as an example for detailed description, where the first adjustment module 41, the second adjustment module 42, and the third adjustment module 43 are respectively used to adjust the corresponding level according to the control of the control module 3. Preferably, the first adjustment module 41, the second adjustment module 42, and the third adjustment module 43 are in the form of an isosceles triangle or an equilateral triangle.
[0074] It should be noted that the substrate inspection device in actual application should be a whole, such as image 3 As shown, figure 2 In order to make the internal structure of the substrate inspection device clearer, the substrate inspection device is divided into the upper part and the lower part to be displayed separately, such as figure 2 As shown, the substrate inspection device also includes a plurality of upper and lower fixed connecting shafts 5 for fixedly connecting the upper part and the lower part of the substrate inspection device. The fixed connecting shaft should ensure that the lower part does not fall and can be Move up and down a certain distance to ensure horizontal adjustment.
[0075] In the embodiment of the present invention, the upper part of the substrate inspection device is used to be fixed on the substrate inspection equipment, and the lower part is mainly used to install the detection sensor 1. The level of the lower part of the substrate inspection device is adjustable, and is connected to the detection sensor 1. The levelness of the first adjustment module 41, the second adjustment module 42, and the third adjustment module 43 specifically adjust the levelness of the detection sensor 1 by adjusting the levelness of the lower half of the substrate detection device.
[0076] Figure 4 Is a schematic diagram of the position of a substrate inspection device in the substrate inspection equipment, Figure 4 In the present invention, the substrate inspection device 8 is installed on the equipment movement shaft 6; in addition, Figure 4 The middle number 7 indicates the bearing base.
[0077] It should be noted that the positions of the first detection module 21, the second detection module 22, the control module 3, the first adjustment module 41, the second adjustment module 42, and the third adjustment module 43 can be set according to actual needs, and are not limited. In the position shown in the embodiment of the present invention.
[0078] Optionally, the first detection module 21 and/or the second detection module 22 are liquid level detectors.
[0079] Optionally, the liquid level detector is a container filled with liquid, and at least two pressure sensors are provided at the bottom of the container,
[0080] The control module 3 is specifically configured to control the first adjustment module 41, and/or the second adjustment module 42, and/or the third adjustment module 43 to perform corresponding levelness according to the pressure value detected by the pressure sensor in the liquid level detector adjust.
[0081] Figure 5 It is a schematic diagram of the liquid level detector in a horizontal state in the above embodiment, such as Figure 5 As shown, when the sensor 1 is level, the built-in container in the liquid level detector is also level. At this time, the pressure sensors on both sides of the bottom are at the same distance from the liquid surface (h1 = h2), according to the calculation formula of the pressure in the liquid: F =ρ·g·h·s It can be seen that the pressures of the two pressure sensors are equal, where F is the pressure of the sensor, ρ is the liquid density, g is the gravity constant, h is the depth, and s is the sensor contact area.
[0082] Image 6 It is a schematic diagram of the liquid level detector in the non-level state in the above embodiment, such as Image 6 As shown, when the detection sensor 1 is tilted, the liquid level detector will also tilt accordingly. According to the fluidity characteristics of the liquid, the liquid level will always remain level. At this time, the distance between the pressure sensor at the bottom of the container and the liquid surface will occur. Change (h′ 1 ≠h′ 2 ), the pressure received by the pressure sensor is not equal, so the control module 4 can calculate according to the pressure value and control the adjustment module to adjust.
[0083] The control module 3 controls the first adjustment module 41, and/or the second adjustment module 42, and/or the third adjustment module 43 to adjust the corresponding level according to the pressure value detected by the pressure sensor in the liquid level detector.
[0084] Figure 7 This is a schematic flow chart of a method for detecting sensor adjustment according to an embodiment of the present invention. Figure 5 The structure shown, such as Figure 7 As shown, when the level of the substrate inspection device is not good (for example, it is tilted), the liquid level detector will also tilt accordingly. First, the pressure sensor in the liquid level detector in the Y direction transmits the detected pressure value to the control module 6. The control module 6 calculates and processes the received signal, and according to the calculation result, the control module 6 controls the two motors at both ends of the liquid level detector in the Y direction to drive the sensor fixing device to adjust until the Y direction remains level. In the process, the liquid level detector in the Y direction detects and feeds back the adjustment results in real time; similarly, the pressure value of the pressure sensor in the liquid level detector in the X direction will also change. When the Y direction is adjusted, start X The direction of the liquid level detector performs detection, and also transmits the detection result to the control module. The control module 6 adjusts another motor according to the calculation result until the X direction remains level. This process is similar to adjusting the Y direction. Since the three motors in this embodiment constitute an isosceles or equilateral triangle, which is equivalent to three points in a plane, it can be ensured that the detection sensor 1 remains level after adjustment in this adjustment sequence.
[0085] Optionally, the liquid level detector is a bubble type liquid level detector,
[0086] The control module 3 is specifically configured to control the first adjustment module 41, and/or the second adjustment module 42, and/or the third adjustment module 43 to adjust the corresponding level according to the position of the bubble in the liquid level detector .
[0087] Optionally, the control module 3 is further configured to control the first adjustment module when the detection value of the first detection module 21 and/or the second detection module 22 or the calculated value based on the detection value is not less than a preset threshold 41. And/or the second adjustment module 42, and/or the third adjustment module 43 perform rapid adjustment; the detection value of the first detection module 21 and/or the second detection module 22 or the calculated value based on the detection value is less than a preset When the threshold value of, the first adjustment module 41, and/or the second adjustment module 42, and/or the third adjustment module 43 are controlled to adjust slowly.
[0088] For example, first set a comparison threshold (comparing the pressure values detected by the two pressure sensors in the liquid level detector). When the level is poor, the difference between the two pressure values is also greater. If the difference exceeds the set value The control module 3 controls the motor to make coarse adjustments at a faster speed until the difference is within the set range, and then controls the motor to make fine adjustments at a slower speed to make the level more accurate.
[0089] Optionally, the first adjustment module 41, and/or the second adjustment module 42, and/or the third adjustment module 43 adjust the level of the detection sensor through a motor or air pressure.
[0090] In one embodiment, the adjustment module is such as Figure 8 In the motor adjustment module shown, three motors are installed on the top of the upper part of the substrate detection device, and the connecting shaft of the motor is connected to the lower part to control the lifting of the lower part, and the three motors are in an isosceles or equilateral triangle The form (ie: one motor is on the bisector of the two motors), according to the principle of three-point surface formation, the level of the lower half of the substrate inspection device can be effectively adjusted; a control module 3 is also installed on the top to mainly receive the liquid level The signal transmitted by the detector (ie the detection module) is calculated and processed, and the motor is controlled according to the calculation result to adjust the corresponding level; the detection sensor 1 is installed and fixed on the lower part, so the liquid level detector is fixedly installed on the substrate detection device The lower part of the sensor ensures that its levelness is consistent with that of the detection sensor 1, so that the levelness of the detection sensor 1 can be detected in real time, and automatically adjusted when the levelness is not good. Specifically, a stepping motor can be used. The motor connecting shaft is fixed to the lower part of the substrate detection device. A bearing connected to the motor screw is fixed in the motor connecting shaft. When the motor rotates, the bearing and the connecting rod can be used. Drive the lower part of the substrate inspection device to move up and down.
[0091] The present invention also correspondingly proposes a detection sensor level adjustment method, Picture 9 It is a schematic flow chart of a method for adjusting the level of a detection sensor according to an embodiment of the present invention, such as Picture 9 As shown, the method includes:
[0092] Step 901: Obtain a detection result of detecting the level of the detection sensor;
[0093] Step 902: Adjust the level of the detection sensor according to the detection result.
[0094] Optionally, the method specifically includes:
[0095] Acquire a first detection result and a second detection result, where the first detection result is the level of the detection sensor in one direction, and the second detection result is the detection perpendicular to the detection direction corresponding to the first detection result The level of the sensor in the other direction;
[0096] According to the obtained first detection result and the second detection result, the first adjustment module, the second adjustment module, and the third adjustment module are controlled to perform corresponding levelness adjustments.
[0097] The obtaining of the detection result of the level of the detection sensor is obtained from a liquid level detector, which is a container filled with liquid, and at least two pressure sensors are provided at the bottom of the container,
[0098] The adjusting the level of the detection sensor according to the detection result is: adjusting the level according to the pressure value detected by the pressure sensor in the liquid level detector.
[0099] Optionally, the obtaining of the detection result of the level of the detection sensor is: obtaining from a liquid level detector, and the liquid level detector is a bubble type liquid level detector,
[0100] The adjusting the level of the detection sensor according to the detection result is: adjusting the level according to the position of the bubble in the liquid level detector.
[0101] Optionally, the adjusting the level of the detection sensor according to the detection result is:
[0102] When the calculated value of the detection result is not less than the preset threshold, fast adjustment is performed; when the detection result is less than the preset threshold, slow adjustment is performed.
[0103] Optionally, the level of the detection sensor is adjusted by a motor or air pressure.
[0104] To figure 2 The illustrated substrate inspection device adjusts the level of the detection sensor as an example, wherein the acquisition in the above method is acquired by the control module; the first detection result is the detection result of the first detection module, and the second detection result is The detection result of the second detection module; here, the first detection module is used to detect the horizontality of the detection sensor in one direction, and the second detection module is used to detect the direction perpendicular to the direction detected by the first detection module Detect the levelness of the sensor in the other direction;
[0105] Specifically, the control module controls the first adjustment module, the second adjustment module, and the third adjustment module to perform corresponding levelness adjustments according to the detection result of the first detection module and the detection result of the second detection module to maintain The detection sensor level.
[0106] Optionally, the obtaining the first detection result and the second detection result is: obtaining the first detection result and the second detection result from a liquid level detector.
[0107] Optionally, the liquid level detector is a container filled with liquid, and at least two pressure sensors are provided at the bottom of the container,
[0108] According to the obtained first detection result and second detection result, controlling the first adjustment module, the second adjustment module, and the third adjustment module to perform corresponding level adjustment is: according to the pressure detected by the pressure sensor in the liquid level detector Value, control the first adjustment module, and/or the second adjustment module, and/or the third adjustment module to adjust the corresponding level.
[0109] Optionally, the liquid level detector is a bubble type liquid level detector,
[0110] According to the obtained first detection result and the second detection result, controlling the first adjustment module, the second adjustment module, and the third adjustment module to perform corresponding level adjustment is: according to the position of the bubble in the liquid level detector, control The first adjustment module, and/or the second adjustment module, and/or the third adjustment module perform corresponding levelness adjustments.
[0111] Optionally, according to the obtained first detection result and the second detection result, controlling the first adjustment module, the second adjustment module, and the third adjustment module to perform corresponding levelness adjustments is:
[0112] When the calculated values of the first detection result and the second detection result are not less than the preset threshold, the first adjustment module, and/or the second adjustment module, and/or the third adjustment module are controlled to perform rapid adjustment; first detection When the result and the second detection result are less than the preset threshold, the first adjustment module, and/or the second adjustment module, and/or the third adjustment module are controlled to perform slow adjustment.
[0113] Optionally, the first adjustment module, and/or the second adjustment module, and/or the third adjustment module perform level adjustment through a motor or air pressure.
[0114] The invention uses the characteristics of liquid fluidity to pass through two directions (such as figure 1 The liquid level detector in the X and Y directions shown in the figure detects the level of the equipment detection device and controls the motor through the control module to automatically adjust the level, so that the detection sensor is always level, improving detection efficiency and detection quality.
[0115] The adjustment method of the present invention is independent, does not require manual adjustment, and is separated from the substrate during adjustment, and does not need to be adjusted according to the signal loaded by the pixels on the substrate; at the same time, coarse adjustment and fine adjustment can be realized according to the tilt of the detection device The two methods are fully automatic, which greatly speeds up the adjustment speed, reduces equipment downtime caused by the failure of level adjustment, improves detection efficiency, ensures the stability of equipment operation and the accuracy of detection results, and saves more engineers Time and energy.
[0116] The foregoing descriptions are only preferred embodiments of the present invention, and are not used to limit the protection scope of the present invention.
