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Locating mechanism for vertical outer ignition device

A positioning mechanism and external ignition technology, which is applied in the direction of combustion ignition, lighting and heating equipment, combustion methods, etc., can solve the problems of not providing effective mechanisms, etc., and achieve the effect of excellent positioning effect, excellent limit effect and simple structure

Active Publication Date: 2014-07-16
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] External ignition devices based on different structures also have different positioning mechanisms. At present, the horizontal positioning mechanism based on horizontal external ignition devices uses a drive block and a drive shaft to realize movement adjustment and positioning in three directions in space; and Based on the vertical positioning mechanism of the vertical external ignition device, the prior art does not provide an effective mechanism to achieve

Method used

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  • Locating mechanism for vertical outer ignition device
  • Locating mechanism for vertical outer ignition device
  • Locating mechanism for vertical outer ignition device

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Experimental program
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Embodiment Construction

[0036] see figure 2 , the positioning mechanism 27 of the present invention is installed at the bottom of the heater 23 of the vertical outer ignition device 22 .

[0037] read on Figure 3 to Figure 6 , the positioning mechanism of the vertical external ignition device of the present embodiment, which includes:

[0038] The upper flange 1 is used to fix the bottom of the heater 23 of the external ignition device 22 through screws 12. It has a first circular hole 44 for the intake pipe of the external ignition device to pass through. The first circular hole 44 is downward extended to form a first cylinder 45, such as Figure 5 As shown, in order to more clearly show the structure of the upper flange 1, Figure 5 will be image 3 and Figure 4 It is displayed after the upper flange 1 is turned upside down;

[0039] The lower flange 2 has a second round hole 54 for the intake pipe of the external ignition device to pass through, and the second round hole 54 extends downwa...

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Abstract

The invention discloses a locating mechanism for a vertical outer ignition device. The locating mechanism comprises an upper-portion flange plate, a lower-portion flange plate, a bottom installation plate, a guide shaft, an adjusting stud and a locking stud. The upper-portion flange plate can drive a heater and an ignition cavity to carry out moving and turning adjustment in a small range and in the horizontal direction. After the adjustment, an adjusting knob can achieve radial and axial fastening and locating of the upper-portion flange plate, the guide shaft, the adjusting stud and the locking stud can achieve axial moving adjustment and locating of the heater and the ignition cavity, and therefore location of any directions and location of the rotation angle in the three-dimensional space of x, y and z can be achieved.

Description

technical field [0001] The invention relates to the technical field of integrated circuit manufacturing, in particular to a positioning mechanism for an external ignition device of vertical heat treatment equipment. Background technique [0002] In the semiconductor vertical heat treatment equipment, there is an external ignition device connected to the process chamber, the process gas enters the main process chamber from the inlet pipe in the external ignition device, and there is a heater in the external ignition device to heat the process gas and carry out a certain process. reaction, the chamber of the external ignition device is connected with the process chamber through a transition pipe. [0003] figure 1 It is a schematic diagram of the connection between the existing vertical process chamber and the vertical external ignition device, such as figure 1 As shown, the main process chamber 21 is connected to the outer ignition device 22 through a quartz transition tube...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F23Q13/00
Inventor 谭瑞雷董金卫
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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