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A device and method for testing material outgassing rate

A technology of outgassing and testing, applied in the direction of analyzing materials, instruments, etc., can solve problems such as oil return, and achieve the effect of ensuring cleanliness

Active Publication Date: 2016-08-24
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] The invention provides a device and method for testing the outgassing rate of materials, which solves the problems of oil return phenomenon, research on the outgassing characteristics of test materials at different temperatures, and the outgassing rate of each gas component of the test material

Method used

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  • A device and method for testing material outgassing rate
  • A device and method for testing material outgassing rate
  • A device and method for testing material outgassing rate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0083] Such as figure 2 As shown, a method for testing the outgassing rate of the material, using the device for testing the outgassing rate of the material, the present embodiment can draw the total outgassing rate of all gas components released by the test material 4 and the release rate of the test material 4 The outgassing rate of a certain gas component.

[0084] A method of testing the outgassing rate of a material comprises:

[0085] S1: Open the hatch of the second vacuum chamber 2, put the test material 4 into the test material box 5, and close the hatch.

[0086] S2: turn on the radiation lamp 18 to heat the test material 4, and stabilize the temperature of the test material 4; because the outgassing rate of the test material 4 is related to the temperature, the temperature of the test material 4 is stabilized, which provides a basis for subsequent calculation of the outgassing rate of the test material 4 an exact temperature value.

[0087] S3: Open the second a...

Embodiment 2

[0123] Such as image 3 As shown, on the basis of [Example 1], turn on the EUV light source to irradiate the sample, and study the outgassing rate of the test material 4 after being irradiated by the EUV light source.

[0124] A method of testing the outgassing rate of a material comprises:

[0125] S21: Open the hatch of the second vacuum chamber 2, put the test material 4 into the test material box 5, and close the hatch.

[0126] S22: turn on the radiation lamp 18 to heat the test material 4, and stabilize the temperature of the test material 4; because the outgassing rate of the test material 4 is related to the temperature, the temperature of the test material 4 is stabilized, which provides a basis for subsequent calculation of the outgassing rate of the test material 4 an exact temperature value.

[0127] S23: Open the second angle valve 11 and the third angle valve 9, start the dry pump 12, start the ion gauge 6, when the first vacuum chamber 1 measured by the ion ga...

Embodiment 3

[0143] Such as Figure 4 Shown is a method for testing the outgassing rate of materials. Using the device for testing the outgassing rate of materials, this embodiment can obtain the total outgassing rate of all gas components released by the test material 4 .

[0144] A method of testing the outgassing rate of a material comprises:

[0145] S41: Open the hatch of the second vacuum chamber 2, put the test material 4 into the test material box 5, and close the hatch.

[0146] S42: turn on the radiation lamp 18 to heat the test material 4, and stabilize the temperature of the test material 4; because the outgassing rate of the test material 4 is related to the temperature, the temperature of the test material 4 is stabilized, which provides for the subsequent calculation of the outgassing rate of the test material 4 an exact temperature value.

[0147] S43: Open the second angle valve 11 and the third angle valve 9, start the dry pump 12, start the ion gauge 6, when the first ...

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Abstract

The invention provides a device for testing outgassing rate of a material, and the device comprises a vacuum chamber, a pump group, a testing system and a gas source. The vacuum chamber comprises a first vacuum chamber and a second vacuum chamber, the first vacuum chamber and the second vacuum chamber are separated by a spaced baffle provided with small holes, the second vacuum chamber is used for placing the test material, and the second vacuum chamber is provided with a radiation lamp; the pump group is connected with the vacuum chamber; the testing system is connected with the vacuum chamber; and the second vacuum chamber is charged with the gas source. The device tests gas pressure in the first vacuum chamber and the second vacuum chamber by the testing system, the total outgassing rate of all gases released by the test material can be tested, and the outgassing rate of one certain gas component released by the test material can be tested.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a device and method for testing the outgassing rate of materials. Background technique [0002] In some vacuum application fields, the system design needs to consider the impact of internal material outgassing on the system in order to ensure the safe operation of the system and design the service life of the equipment. At this time, it is necessary to test the outgassing rate of the internal materials in the system. [0003] In the magazine "Vacuum", No. 02, 1982, in the document "Testing the Outgassing Rate of Some Domestic Vacuum Materials", a test device for testing the outgassing rate of materials is provided. This device is mainly used to test the outgassing rate of non-metallic materials. Outgassing rate, the room temperature outgassing rate test of 30 kinds of materials was carried out, the results showed that it was close to the foreign test data, and its test accuracy coul...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N7/00
Inventor 俞芸许琦欣李佳
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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