Embedded molecular pump with measurable pressure ratio

Abstract

An embedded molecular pump capable of measuring the pressure ratio comprises a shell body and a rotor. An end face flange is arranged at the top of the shell body, a first-stage molecular pump is arranged between the shell body and the rotor, the top of the first-stage molecular pump is connected with a third-stage disc-shaped molecular pump, a second-stage molecular pump is arranged in an assembling groove of the third-stage molecular pump, and the end face flange is connected with the third-stage molecular pump. An inlet pressure measuring device is arranged on the outer side of the lower portion of the shell body, and the top end of the end face flange is respectively connected with a first-stage molecular pump outlet pressure measuring device, a second-stage outlet pressure measuring device and a third-stage outlet pressure measuring device. The embedded molecular pump is simple in structure and easy to machine and assemble, feasibility of pressure measurement of an outlet of the third-stage molecular pump is guaranteed, the problem of continuous pressure introduction is solved, the risks of breakage, air leakage and blocking in the pressure introduction process are avoided, meanwhile, the problem that a pressure introduction pipe penetrates out of a machine and cannot be sealed is solved, and it is guaranteed that a safety protection device of the embedded molecular pump can work normally and is not influenced in the normal work process.

Description

technical field [0001] The invention belongs to a molecular pump, in particular to an embedded molecular pump capable of measuring pressure ratio. Background technique [0002] The traction molecular pump relies on the gas molecules colliding with the high-speed rotor to gain momentum, thereby driving the gas molecules to the outlet of the pump. [0003] The change of the inlet and outlet pressure of the traction molecular pump and the compression ratio (ratio of the inlet and outlet pressure) can intuitively reflect the working state and pumping performance of the device, so the real-time measurement of the inlet and outlet pressure of the molecular pump at all levels is at the It is very important in the development process. At present, the general-purpose molecular pump equipment can only be connected with the device in series to evacuate it, but its evacuation effect is poor, especially when a certain rotating part needs to rotate at a high speed and the surrounding pre...

AI Technical Summary

Problems solved by technology

At present, the general-purpose molecular pump equipment can only be connected to the device in series to evacuate it, but its evacuation effect is poor, especially when a certain rotating part needs to rotate at a high speed and the surrounding pressure is extremely low, it cannot meet the evacuation requirements at all. , so that the motor power cannot be further reduced

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