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Method for judging whether symmetrical aspheric surfaces of rotary shaft can be subjected to direct interference detection

A technology of interference detection and aspheric surface, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of only qualitative detection, inability to detect rotational axis symmetric high-order surfaces, and many detection personnel.

Inactive Publication Date: 2014-09-17
NANTONG UNIVERSITY
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  • Application Information

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Problems solved by technology

The aberration point detection method has the following disadvantages: the aberration point detection is mainly used to detect the rotation axis symmetric quadratic surface, and cannot detect the rotation axis symmetry high-order surface; it depends on the experience of the inspection personnel and can only do qualitative detection
At present, direct interference detection can be used for rotational axisymmetric aspheric surfaces, mostly based on empirical judgment, which brings certain difficulties to the formulation of aspheric surface detection schemes

Method used

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  • Method for judging whether symmetrical aspheric surfaces of rotary shaft can be subjected to direct interference detection
  • Method for judging whether symmetrical aspheric surfaces of rotary shaft can be subjected to direct interference detection
  • Method for judging whether symmetrical aspheric surfaces of rotary shaft can be subjected to direct interference detection

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Embodiment 1

[0123] Embodiment 1 adopting above-mentioned judging method is as follows:

[0124] The pixel array of the sampling detector in the digital wave surface interferometer is 640*480, and the wavelength of the light source is λ=0.6328 microns. The judgment results of whether direct interference detection can be used for several rotational axisymmetric aspheric surfaces with different aspheric surface parameters are shown in Table 1. :

[0125] Table 1:

[0126] .

Embodiment 2

[0127] The embodiment two that adopts above-mentioned judging method is as follows:

[0128] The pixel array of the sampling detector in the digital wavefront interferometer is 1024*1024, and the wavelength of the light source is λ=0.6328 microns. For several rotational axisymmetric aspheric surfaces with different aspheric surface parameters, the judgment results of whether direct interference detection can be used are shown in Table 2. :

[0129] Table 2:

[0130] .

[0131] The present invention overcomes the inaccuracy of empirically judging whether a certain rotational axis symmetric aspheric surface can adopt direct interference detection for a certain digital wave surface interferometer. The method of direct interference detection is reliable in theory, accurate in judgment, wide in scope of application, saves time for formulating a detection scheme for rotationally symmetrical aspheric surfaces, and improves work efficiency.

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Abstract

The invention discloses a method for judging whether symmetrical aspheric surfaces of a rotary shaft can be subjected to direct interference detection. The judgment basis is that when a digital wave surface interferometer is used for conducting direct interference detection on the symmetrical aspheric surfaces of the rotary shaft, whether a collected interference pattern can be completely identified by a detector of the digital wave surface interferometer, namely whether a wave aberration corresponding to an interference fringe at the position where interference fringes are densest on the interference pattern does not exceed the wave aberration corresponding to the Nyquist frequency of the detector is identified; if the collected interference pattern can be completely identified by the detector of the digital wave surface interferometer, the digital wave surface interferometer can be used for conducting direct interference detection on the symmetrical aspheric surfaces of the rotary shaft. The method overcomes the defect of inaccuracy of judging whether symmetrical aspheric surfaces of a certain rotary shaft can be subjected to direct interference detection through a certain digital wave surface interferometer according to experience. The method can be used for visually and accurately judging whether the symmetrical aspheric surfaces of the rotary shaft can be subjected to direct interference detection, and has the advantages that the theory is reliable, judgment is accurate, application range is wide, the time for making a scheme for detecting the symmetrical aspheric surfaces of the rotary shaft is saved, and working efficiency is improved.

Description

technical field [0001] The invention belongs to the technical field of advanced optical manufacturing and detection, and specifically relates to a method for judging whether direct interference detection can be used for a rotational axis symmetrical aspheric surface. Background technique [0002] The detection of the surface shape of high-precision optical aspheric components mainly adopts interference detection technology. In this technology, aberration-free point detection, zero-position compensation interference detection and non-zero-position interference detection have been widely used in the surface shape detection of aspheric surface polishing. . [0003] Among them, the aberration point detection means that according to the Fermat principle, the light passes from one point to another point, after any number of refraction or reflection, the optical path is the maximum or minimum value, that is to say, the optical path is a constant value, Optically, such points are c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 潘宝珠汤靖董小燕沐仁旺方靖淮崔荣华赵永林
Owner NANTONG UNIVERSITY
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