A real-time compensation device and method for comprehensive error of spindle

Abstract

The invention discloses a device and a method for compensating a composition error of a main shaft in real time. The device comprises a radial capacitance displacement sensor, an axial capacitance displacement sensor, a control computer, a two-degree of freedom sharp knife servo controller and a two-degree of freedom sharp knife servo unit, wherein the output end of the radial capacitance displacement sensor is connected with the first input end of the control computer; the output end of the axial capacitance displacement sensor is connected with the second input end of the control computer; the two-degree of freedom sharp knife servo controller is respectively connected with the control computer and the two-degree of freedom sharp knife servo unit; the two-degree of freedom sharp knife servo unit is connected with a processing cuter; the radial capacitance displacement sensor is arranged at one side of the processing cutter, and the axial line thereof is vertically intersected with the axial line of a work-piece; the axial capacitance displacement sensor is arranged on one end face of the work-piece, and the axial line thereof is vertical to the end face of the work-piece. The device and the method for compensating the composition error of the main shaft in real time can perform on-line and real-time measurement and compensation on the composition error simply, rapidly and comprehensively, and can be widely applied to the field of precision machine tool machining.

Description

technical field [0001] The invention relates to the field of precision machine tool processing, in particular to a real-time compensation device and method for comprehensive error of a spindle used for processing the microstructure of a roller on an ultra-precision machine tool. Background technique [0002] The microstructures on many optical devices are processed by roll forming, and the rollers used in roll forming are mostly processed by single-point diamond ultra-precision machine tools. Due to the very small size of the microstructure, the requirements for the shape accuracy and surface roughness of the structure are very high, which also puts forward very high requirements for the machining accuracy of the machine tool. [0003] Spindle is an important component widely used in ultra-precision machine tools, and its motion accuracy has decisive significance for processing quality. With the development of the air bearing spindle, the precision of the spindle has been g...

AI Technical Summary

Problems solved by technology

In the current technology, basically only the synchronous error of the spindle is detected or compensated, or only the non-synchronized error is detected or corrected, and the method adopted is relatively complicated, requiring various cumbersome calculations, the response speed is slow, and it cannot be comprehensively analyzed. Respond to the error of the spindle, resulting in a large error in precision machining

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