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Bell-shaped Cover And Vacuum Processing Device

A technology of vacuum processing device and bell jar, which is applied in the manufacture of discharge tubes, electrical components, semiconductor/solid-state devices, etc., can solve problems such as insufficient strength, and achieve the effect of improving structural strength

Inactive Publication Date: 2014-10-15
FURUKAWA COMPANY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is a problem that, because the bell is made of quartz glass, the larger the bell, the less strong it is

Method used

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  • Bell-shaped Cover And Vacuum Processing Device
  • Bell-shaped Cover And Vacuum Processing Device
  • Bell-shaped Cover And Vacuum Processing Device

Examples

Experimental program
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Embodiment Construction

[0069] Embodiments of the present invention will be described below using the drawings. In addition, in all drawings, the same code|symbol is attached|subjected to the same component, and description is abbreviate|omitted suitably.

[0070] figure 1 is a front sectional view of the bell jar 10 of the embodiment, figure 2 is a plan view of the bell jar 10 .

[0071] The bell jar 10 of the present embodiment constitutes a vacuum processing device 100 ( Figure 6 ) The bell jar 10 made of quartz glass in the chamber 110, wherein the vacuum processing apparatus 100 is used to make the chamber 110 a negative pressure to perform predetermined processing on the object to be processed. This bell jar 10 has: a main body 11 whose lower end is open; a flange 12 formed along the lower end of the main body 11; part, and extend along the circumferential direction of the main body part 11. Hereinafter, it demonstrates in detail.

[0072] The bell jar 10 is a bell-shaped container with...

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Abstract

The present invention provides a bell-shaped cover enabling the structural strength to be improved and a vacuum processing device. The bell-shaped cover (10) is made of quartz glass and is used for a cavity (10) forming the vacuum processing device (100), and the vacuum processing device (100) enables the interior of the cavity to be negative pressure to carry out specified processing on an object. The bell-shaped cover (10) comprises a hanging bell-shaped main body part (11) of which the lower end is open, a flange part (12) formed along the lower end of the main body part (11), and a protruding strip part (13) formed at the part of the side surface (11a) of the main body part (11) more closer to the upper side than the flange part (12), and extending along the circumferential direction of the main body part (11).

Description

technical field [0001] The present invention relates to bell jars and vacuum handling apparatus. Background technique [0002] As a vacuum processing apparatus for performing predetermined processing on an object to be processed, such as a substrate, in a state where the inside of the chamber is under negative pressure, there is a type of vacuum processing apparatus having a bell jar. The bell jar is a container made of quartz glass, and its lower end is open. Objects to be processed are various substrates and the like. [0003] Patent Documents 1 to 4 describe bell jars. As described in these documents, generally, the lower end of the bell jar has a flange shape. In addition, Patent Document 1 shows a configuration in which the thickness of the lower portion of the bell gradually increases as it approaches the flange at the lower end. [0004] Patent Document 1: Japanese Patent Laid-Open No. 2008-258240; [0005] Patent Document 2: Japanese Patent Application Laid-Open...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01J37/32477H01L21/67017H01L21/67109
Inventor 小池一孝
Owner FURUKAWA COMPANY
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