Optical fiber phase shifting device capable of compensating optical path difference

Abstract

The invention discloses an optical fiber phase shifting device capable of compensating optical path difference. The optical fiber phase shifting device capable of compensating the optical path difference comprises a pedestal, and a first optical fiber coupler module and a second optical fiber coupler module respectively fixed at two ends of the pedestal, wherein the first optical fiber coupler module and the second optical fiber coupler module are aligned to each other, the first optical fiber coupler module comprises a first optical fiber transmission line, a first five-freedom rotating regulating optical fiber coupler and a first bracket, the first five-freedom rotating regulating optical fiber coupler is fixed on the pedestal through the first bracket, and the first optical fiber transmission line is connected with the first five-freedom rotating regulating optical fiber coupler. The optical fiber phase shifting device capable of compensating the optical path difference generates phase shifting outside the optical path of a measured imaging system, eliminates the system error caused by traditional phase shifting, simplifies the overall structure of the measuring system and has advantages of simple structure and easiness in assembling, and the optical fiber phase shifting device is capable of compensating the special optical path difference.

Description

technical field [0001] The invention relates to the field of interferometric measurement, in particular to an optical fiber phase shift device capable of compensating optical path difference that generates phase shift outside the optical path of the measurement imaging system. Background technique [0002] In a variety of experiments and systems based on interferometric optics, it is desirable to control the phase of the beam, including point diffraction interferometer, transverse shear interferometer, phase profilometry and holographic interferometry, stellar interferometry, etc., and the optical phase shift can be different. way to introduce. [0003] The general phase shift methods include piezoelectric ceramic (PZT) phase shift, grating phase shift, polarization phase shift and so on. However, these phase shifting devices can only produce a phase shift of a few wavelengths. In some interferometers using short coherent light sources, not only high-precision phase shift ...

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Problems solved by technology

Such as the prior art (see G.E.Sommargren, D.W.Phillion, M.A.Johnson, et al, "100-picometer interferometry for EUVL", SPIE Vol.4688, 316-328, 2002) through devices such as beam splitters, PZTs, and corner cubes Realize the functions of phase shift and optical path compensation, but the phase shift and optical path compensation are divided into two optical paths, the structure is complex

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