Vibrating plates, vibrators, oscillators, and electronic instruments
A vibrating arm and vibrating device technology, which is applied to electrical components, impedance networks, etc., can solve problems such as vibration energy loss and vibration plate performance degradation
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no. 1 approach
[0098] figure 1 This is for schematically describing a plan view of the crystal vibrating piece as the vibrating piece of the first embodiment viewed from one main surface side. and, figure 2 It is a diagram for schematically explaining the cross-section of each part of the crystal vibrating piece, (a) is figure 1 The cross-sectional view of the a-a line, (b) is figure 1 The cross-sectional view of line c-c, (c) is figure 1 The cross-sectional view of the b-b line.
[0099] In this example, crystal is used as the piezoelectric material as an example.
[0100] exist figure 1 Among them, the crystal vibrating piece 20 is a piezoelectric vibrating piece composed of crystal. And, as the crystal wafer (crystal base material) constituting the crystal prototype of the crystal vibrating piece 20 of the present embodiment, a crystal wafer obtained as follows is used, that is, on the orthogonal coordinates composed of the X axis, the Y axis, and the Z axis. In the system, for...
no. 2 approach
[0153] Hereinafter, a crystal vibrating piece as a vibrating piece according to a second embodiment will be described. Figure 5 is a plan view of the vibrating element of the second embodiment.
[0154] Regarding the crystal vibrating piece of the second embodiment to be described below, the differences from the above-mentioned embodiment will be mainly described, and the description will be omitted for the same cases.
[0155] The crystal vibrating piece 70 of the present embodiment is provided with: two vibrating arms 78, 79 extending from the end of the base 77; a pair (two) supporting arms (outer arms) 74B, 75B relatively The arms 78 , 79 are parallel to the vibrating arms 78 , 79 on both outer sides in the X-axis direction. Bottomed elongated grooves 72 and 73 having openings on the principal surfaces are respectively provided in the two vibrating arms 78 and 79 . The two support arms 74B, 75B are provided so as to respectively extend in the Y-axis direction from the b...
no. 3 approach
[0169] Hereinafter, a vibrator including a crystal vibrating piece as the vibrating piece in the above-mentioned embodiment will be described as a third embodiment.
[0170] Image 6 is a schematic diagram showing a schematic configuration of a vibrator according to the third embodiment, Image 6 (a) is a top view, Image 6 (b) for Image 6 (a) Cross-sectional view of line F-F. In addition, in the present embodiment, the structure of the crystal vibrating piece 20 as the vibrating piece described in the first embodiment is taken as an example, and its configuration will be described.
[0171] Such as Image 6 As shown, the crystal vibrator 5 as a vibrator includes the crystal vibrating piece 20 of the first embodiment and the case 80 for accommodating the crystal vibrating piece 20 . The shell 80 is composed of a shell base 81 , a seam ring 82 , a cover 85 and the like. On the housing base 81, a concave portion capable of accommodating the crystal vibrating piece 20 is f...
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