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Thin film adsorption equipment

A technology of film adsorption and equipment, which is applied in the manufacturing of electrical components, electric solid-state devices, semiconductor/solid-state devices, etc., which can solve the problems of spending a lot of time, taking and pulling the blue film, and pasting the blue film.

Active Publication Date: 2017-06-09
CHROMA ATE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in actual use, it will take a lot of time (for example, 4 minutes) to measure the luminous characteristics of the LED chip after the blue film reaches a level state, causing inconvenience in loading
In addition, the blue film is elastic and viscous. After vacuuming the space between the blue film and the adsorption device for a long time, the blue film will stick to the fixture, and it will cause pulling when the blue film is taken, resulting in blanking inconvenient

Method used

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  • Thin film adsorption equipment
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Embodiment Construction

[0026] A number of embodiments of the present invention will be described below with figures, and many practical details will be described together in the following description for the sake of clarity. It should be understood, however, that these practical details should not be used to limit the invention. That is, in some embodiments of the present invention, these practical details are unnecessary. In addition, for the sake of simplifying the drawings, some known and commonly used structures and elements will be shown in a simple and schematic manner in the drawings.

[0027] figure 1 A cross-sectional view of a thin film adsorption device 100 according to an embodiment of the present invention is shown. As shown in the figure, the film adsorption device 100 includes a support base 110 , a first channel 120 , a second channel 130 , a third channel 140 and a fourth channel 150 . Wherein, the support base 110 has an adsorption surface 112 . The first channel 120 runs throu...

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Abstract

Disclosed is a film absorption device which includes a support seat, a first channel, a second channel and a pump. The support seat is provided with an absorption face. The first channel passes through the support seat. The first channel is provided with a first opening and a second opening, and the first opening of the first channel is on the absorption face. The second channel passes through the support seat. The second channel is provided with a first opening and a second opening, and the first opening of the second channel is on the absorption face. The pump is in communication with the second opening of the second channel. When a first film is arranged on the absorption face and covers the first opening of the first channel and the first opening of the second channel, the pump extracts air so as to drive a first air flow to flow in from the second opening of the first channel and pass through a gap between the absorption face and the film so as to absorb the film.

Description

technical field [0001] The invention relates to a film adsorption device. Background technique [0002] Generally speaking, when measuring the luminous characteristics of a light emitting diode (Light Emitting Diode; LED) chip, the blue tape with a plurality of LED chips can be placed on an adsorption device, and then the measuring equipment Measure LED chips. After the adsorption device initially locates the blue film, the blue film may be uneven due to the presence of air between the blue film and the adsorption device. Therefore, it is necessary to vacuum the space between the blue film and the adsorption device to reduce the measurement error of the LED chip. [0003] The known adsorption device usually adopts a two-stage vacuuming method to achieve the effect of positioning and leveling the blue film. For example, known adsorption devices may have an inner suction port and an outer suction port. After the blue film is placed on the adsorption device, the pump can be ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/673H01L21/683
CPCH01L21/6838H01L2221/683
Inventor 翁思渊蔡馥禧
Owner CHROMA ATE