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Z-axis structure in accelerometer and triaxial accelerometer

An accelerometer, Z-axis technology, used in the measurement of acceleration, speed/acceleration/shock measurement, instruments, etc., can solve the problems of reducing capacitance variation, intensifying coupling between axes, reducing detection accuracy, etc., to achieve the effect of improving accuracy

Active Publication Date: 2015-03-25
GOERTEK MICROELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the single-structure implementation scheme, the z-axis acceleration is generally measured through the eccentric structure. In this scheme, in addition to the z-axis detection motion, the eccentric feature of the structure is used, and the detection motion of a certain axis (such as the x-axis or y-axis) in the plane is also It will be affected by the eccentric characteristics of the structure, so its motion is actually a swing rather than a linear motion. On the one hand, this motion will intensify the inter-axis coupling, and on the other hand, it will reduce the capacitance change, thus greatly reducing the detection accuracy.

Method used

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  • Z-axis structure in accelerometer and triaxial accelerometer
  • Z-axis structure in accelerometer and triaxial accelerometer
  • Z-axis structure in accelerometer and triaxial accelerometer

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Embodiment Construction

[0023] In order to make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects obtained easy to understand, the specific implementation manners of the present invention will be further described below in conjunction with the specific drawings.

[0024] refer to figure 1 , the present invention provides a Z-axis structure in an accelerometer, which includes two structurally symmetrical inertial measurement modules, each inertial measurement module includes a substrate (not shown in the view), on which the inertial measurement module can be laid out circuit and other components. The substrate is provided with a first pole piece 4 (indicated by a dotted line in the figure) as a lower electrode.

[0025] It also includes a mass block 1 located above the substrate, and a support system 5 supporting the mass block 1 above the substrate. The support system 5 is an elastic cross beam, which includes a first elastic beam 12 ...

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Abstract

The invention provides a Z-axis structure in an accelerometer and a triaxial accelerometer. The Z-axis structure comprises first elastic beams in the X-axis direction and second elastic beams in the Y-axis direction. The two ends of each second elastic beam are connected to anchor points of a base plate. The two ends of each first elastic beam are connected with mass blocks, and the first elastic beams deviate from the center lines of the mass blocks in the X-axis direction. The Z-axis structure further comprises two crossbeams, longitudinal beams and a stiffening girder, wherein the crossbeams and the longitudinal beams connect the mass blocks, and the stiffening girder connects the two crossbeams. The second elastic beams in two inertia measurement modules are symmetrically distributed relative to the stiffening girder. Movement on an axis (the X axis and the Y axis) in a plane of the triaxial accelerometer can not be influenced by the structural eccentricity characteristic, so that the movement on the X axis and the Y axis is linear movement, and therefore coupling between axes can not be enhanced; the displacement of the mass blocks on the X axis and the Y axis can not be lowered, and the precision of capacitance detection is improved.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical (MEMS), and more precisely, relates to a Z-axis structure in an accelerometer; the invention also relates to a three-axis accelerometer. Background technique [0002] MEMS accelerometer is an inertial device based on MEMS technology, which is used to measure the linear motion acceleration of object motion. It has the characteristics of small size, high reliability, low cost, suitable for mass production, etc., so it has broad market prospects, and its application fields include consumer electronics, aerospace, automobiles, medical equipment and weapons, etc. [0003] At present, there are usually two implementation methods for three-axis accelerometers. One is a patchwork method, which combines three single-axis structures or a dual-axis and a single-axis structure to realize the measurement of three axial accelerations. The second is to use a single structure to realize the measurement of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125
Inventor 张廷凯
Owner GOERTEK MICROELECTRONICS CO LTD
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