Z-axis structure and three-axis accelerometer in an accelerometer

Abstract

The present invention provides a Z-axis structure and a three-axis accelerometer in an accelerometer, including a first elastic beam located in the X-axis direction and a second elastic beam located in the Y-axis direction, wherein the two elastic beams of the second elastic beam The end is connected to the anchor point of the substrate, the two ends of the first elastic beam are connected to the mass block, and the first elastic beam deviates from the center line of the mass block in the X-axis direction; it also includes a beam and a longitudinal beam connecting the mass blocks; it is also provided There is a reinforcing beam connecting two beams, wherein the second elastic beams in the two inertial measurement modules are distributed symmetrically with respect to the reinforcing beam. In the three-axis accelerometer of the present invention, the motion of a certain axis (X axis, Y axis) in the plane will not be affected by the eccentricity of the structure, so that the motions of the X axis and the Y axis are all linear motions, thereby not aggravating the axis On the other hand, it will not reduce the displacement of the mass block on the X-axis and Y-axis, thereby improving the accuracy of capacitance detection.

Description

technical field [0001] The invention belongs to the field of micro-electromechanical (MEMS), and more precisely, relates to a Z-axis structure in an accelerometer; the invention also relates to a three-axis accelerometer. Background technique [0002] MEMS accelerometer is an inertial device based on MEMS technology, which is used to measure the linear motion acceleration of object motion. It has the characteristics of small size, high reliability, low cost, suitable for mass production, etc., so it has broad market prospects, and its application fields include consumer electronics, aerospace, automobiles, medical equipment and weapons, etc. [0003] At present, there are usually two implementation methods for three-axis accelerometers. One is a patchwork method, which combines three single-axis structures or a dual-axis and a single-axis structure to realize the measurement of three axial accelerations. The second is to use a single structure to realize the measurement of ...

AI Technical Summary

Problems solved by technology

In the single-structure implementation scheme, the z-axis acceleration is generally measured through the eccentric structure. In this scheme, in addition to the z-axis detection motion, the eccentric feature of the structure is used, and the detection motion of a certain axis (such as the x-axis or y-axis) in the plane is also It will be affected by the eccentric characteristics of the structure, so its motion is actually a swing rather than a linear motion. On the one hand, this motion will intensify the inter-axis coupling, and on the other hand, it will reduce the capacitance change, thus greatly reducing the detection accuracy.

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