Unlock instant, AI-driven research and patent intelligence for your innovation.

Method for achieving mixed production with machines in different specifications

A technology of one machine and one machine, applied in the field of realizing mixed production of different types of machines, can solve problems such as unsolved technical problems

Inactive Publication Date: 2015-03-25
SHANGHAI HUALI MICROELECTRONICS CORP
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Above-mentioned patent does not solve the technical problem proposed by the present invention

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for achieving mixed production with machines in different specifications
  • Method for achieving mixed production with machines in different specifications

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0024] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

[0025] like figure 1 As shown, the present invention provides a kind of method that realizes the mixed production of different machines, is applied in the product production technological process (flow), comprises the following steps:

[0026] Step S1, adding at least two machines of different types to the same machine group in the flow, and distinguishing them in other ways, for example, adding ABC-type machines and BBC-type machines to the same machine group, and defining The name of the machine group is ABC. For example, the first code in the name of the machine indicates the model of the machine, and the last two codes indicate the function of the machine. Among them, ABC-type machines have ABC01 / 02; BBC-type machines have BBC01 / BBC02; The machine group name is ABC.

[0027] Step S2, addin...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to the technical field of semiconductor manufacturing, in particular to a method for achieving mixed production with machines in different specifications. A machine group is adopted, the processing names of the machines in different specifications are connected by means of separators to form a processing group name, the photomask names of the machines in different specifications are connected by means of separators to form a photomask group name, and then the processing names and photomask names of the machines in the same specification are made to correspond, so that mixed production with machines in different specifications, different photomasks and different processes adopted in one step is achieved without adding paths in the production technology process. In this way, labor is saved, and productivity waste is avoided.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a method for realizing mixed production of different types of machines. Background technique [0002] The production process of the product clearly specifies what steps need to be taken in each step of the product, what kind of machine, what program, lithography and mask are used in this step, and any error in any of the contents will cause serious consequences. If different types of machines use different masks to achieve the same process steps, they are usually placed in the product flow (process flow) in a multi-path (multi-path) manner. The general practice of the multi path method is to put a dummy step (empty step) to manually specify which group (group) of machines to run (run) the product. Although this method can also realize the mixed production of different types of machines, each product needs to manually select the machine. In addition to requir...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677G03F7/00H01L21/67
CPCH01L21/02008G03F7/00G03F7/20H01L21/67155H01L21/67703H01L2221/67
Inventor 赵静芬朱骏陈力钧李德建
Owner SHANGHAI HUALI MICROELECTRONICS CORP