A device for generating a combined plasma sheet
A plasma sheet and generation device technology, applied in the field of plasma, can solve the problem that the magnetically constrained linear hollow cathode cannot generate multiple plasma sheets at the same time, and achieve the effect of strong engineering applicability and saving manufacturing costs
Active Publication Date: 2017-06-13
NAT SPACE SCI CENT CAS
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Problems solved by technology
[0007] The purpose of the present invention is to solve the technical problem that the existing magnetically constrained linear hollow cathodes cannot simultaneously generate multiple plasma sheets, and the present invention provides a combined plasma sheet generation device
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[0022] In the following, a combined plasma sheet generating device according to the present invention will be described in detail with reference to the accompanying drawings and embodiments.
[0023] Such as figure 2 As shown, a combined plasma sheet generating device of the present invention includes: an anode plate 1, a combined hollow cathode 4, a vacuum discharge chamber 2 and a Helmholtz sleeved outside the vacuum discharge chamber 2 Coil 3, the vacuum discharge chamber 2 and the Helmholtz coil 3 are arranged coaxially; the combined hollow cathode 4 is arranged in the vacuum discharge chamber 2 in parallel with the anode plate 1; image 3 As shown, the combined hollow cathode includes a number of groove-shaped cathodes 5 and a cathode top plate 6; all groove-shaped cathodes 5 are arranged below the cathode top plate 6, and the groove-shaped cathode 5 is moved horizontally to adjust its production The position of the plasma sheet 7.
[0024] Devices based on the above structu...
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The invention provides a combined plasma sheet generating device, comprising: an anode plate (1), a combined hollow cathode (4), a vacuum discharge cavity (2) and a vacuum discharge cavity (2) The outer Helmholtz coil (3); the combined hollow cathode (4) is opposite and parallel to the anode plate (1) and arranged in the vacuum discharge chamber (2); the combined hollow cathode (4) It includes several groove-shaped cathodes (5) and cathode top plates (6); all groove-shaped cathodes (5) are arranged under the cathode top plate (6), and are adjusted by moving the groove-shaped cathodes (5) horizontally. The location of the plasma sheet (7). The device can generate multiple large-area, high-density plasma sheets at the same time. In addition to increasing the number of groove-shaped cathodes, it does not need to add additional equipment, and can control the generation of plasma sheet combinations with different numbers and positions according to needs.
Description
Technical field [0001] The invention relates to the field of plasma technology, in particular to a combined plasma sheet generating device. Background technique [0002] Plasma is the "fourth state" in which matter exists in nature, and the technology that uses the characteristics of plasma to serve humans is called plasma technology. So far, plasma technology has been widely used in welding, cutting, lighting, metallurgy, magnetic fluid power generation, microelectronics processing, material surface modification, preparation of ultra-fine and ultra-pure materials, waste treatment, aircraft stealth, plasma antennas And other traditional industrial fields and high-tech fields. [0003] At present, the use of electric field to ionize gas is the main way to artificially generate plasma. This method of generating plasma is called gas discharge. Generally, gas discharge is divided into corona discharge, glow discharge, dielectric barrier discharge, microwave discharge and radio freque...
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IPC IPC(8): H05H1/24
Inventor 孙海龙夏俊明霍文青徐跃民孙简
Owner NAT SPACE SCI CENT CAS