Temperature Sensor
A temperature sensor, sensor technology, applied in thermometers, resistors with negative temperature coefficients, instruments, etc., can solve the problems of difficult temperature detection, damage to the surface of the roller, poor responsiveness, etc., to achieve good B constant, accurate temperature measurement, Highly responsive effects
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[0100] Next, regarding the temperature sensor involved in the present invention, refer to Figure 11 to Figure 19 The results of evaluation based on the examples prepared according to the above-mentioned embodiment will be specifically described.
[0101]
[0102] Examples and comparative examples for evaluating the thermistor material layer (thin film thermistor part 7) of the present invention were prepared as follows Figure 11 Element 121 is shown for film evaluation.
[0103] First, by the reactive sputtering method, Ti-Al alloy targets with various composition ratios were used to form Si substrates S with a thickness of Thin film thermistor part 7 of 500nm metal nitride material. The sputtering condition at this time is, reaching the vacuum degree: 5×10 -6 Pa, sputtering gas pressure: 0.1 ~ 1Pa, target input power (output power): 100 ~ 500W, in the mixed gas atmosphere of Ar gas + nitrogen gas, and change the nitrogen gas fraction to 10 ~ 100%.
[0104] Next, a Cr ...
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