Material distributing device for gas mixture materials

Abstract

The invention discloses a material distributing device for gas mixture materials. The material distributing device for gas mixture materials comprises a second container. According to the invention, a bottom connector of the second container is connected with a first container by a first straight-through valve; a third straight-through valve, a four-way connector and a second straight-through valve are orderly arranged at a top connector of the second container in a bottom-up way; a fifth straight-through valve, a flexible pipe and a first three-way connector are orderly arranged at one end of the four-way connector; one end of the first three-way connector is provided with a mass flowmeter while the other end is connected with a side wall of the second container by a seventh straight-through valve; a fourth straight-through valve, another flexible pipe and a second three-way connector are orderly arranged at the other end of the four-way connector; one end of the second three-way connector is arranged with a mass flowmeter while the other end is connected with the other connector of the side wall of the second container by an eighth straight-through valve. According to the invention, continuing mixture supply and quantitative adjustment are realized for N2 or O2 and HF, and meanwhile, uniform mixing of the materials under the condition that respective flow is stable and constant is ensured. Furthermore, flows of HF, N2 or O2 are controlled by a volume method, so as to not only solve the problem that respective preparation is not convenient because the material flows are not obviously different, but also solve the problem that operations are complex in a material flow adjusting process.

Description

Technical field [0001] The invention belongs to a batching device, in particular to a batching device for gas mixture materials. Background technique [0002] In the process of development and acceptance of certain separation equipment, the separation performance must be tested by continuously passing light impurity materials of different flow rates, different contents and different material compositions. In the inspection process, some mixed materials are required, such as N 2 Or O 2 It is mixed with HF, etc., but the existing batching device still cannot solve the technical problems of uninterrupted parallel feeding of multiple gaseous materials and uniform feeding of multiple gaseous materials at the same time, and the existing device is in the batching process of each gaseous material. The flow cannot be adjusted at any time, and the operation is inconvenient. Summary of the invention [0003] The present invention is proposed to solve the problems existing in the prior art, ...

AI Technical Summary

Problems solved by technology

Some mixed materials are required in the inspection process, such as adding N 2 or O 2 Mixing and batching with HF, etc., but the existing batching device still cannot solve the technical problems of uninterrupted parallel feeding of multiple gaseous materials and uniform feeding of multiple gaseous materials, and the existing device is in the batching process. The flow rate cannot be adjusted at any time, and the operation is inconvenient

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