The invention discloses a method for maskless growth of a
transition metal chalcogenide array. The method comprises the following steps: dissolving
transition metal salt and alkali in water to form a precursor solution; hydrophobic modification is carried out on a substrate through OTS, and then a hydrophilic array is formed through
etching of a
laser marking
machine; spin-
coating the precursor solution on a substrate to realize region limited distribution of a precursor; placing the precursor in a tubular furnace constant-temperature area, placing
chalcogenide powder in the gas inlet end of the tubular furnace, vacuumizing the tubular furnace, introducing protective gas, starting heating, sublimating the
chalcogenide powder, enabling the chalcogenide
powder to enter the tubular furnace constant-temperature area, and carrying out reaction annealing on the chalcogenide powder and the precursor in the hydrophilic array area to obtain the
transition metal chalcogenide array. According to the method, a maskless growth method is adopted, oriented growth of the TMDs array is achieved by regulating and controlling the hydrophilic and hydrophobic properties of the surface of the substrate and the synergistic effect of CVD parameters, the defects in the prior art can be effectively overcome, and the method is high in
crystallinity, few in defect, high in
position control precision, high in device compatibility, simple and convenient in process and low in cost.