The invention relates to the field of photoelectric detection preparation, in particular to a large-area
platinum selenide film preparation method based on a two-
step method. The preparation method comprises the following steps: firstly, preparing
platinum film units on a substrate in an array arrangement manner; an aluminum
oxide isolation layer is deposited on the periphery of each
platinum film unit to form a micron-sized aluminum
oxide isolation wall, gas-phase
side reaction is inhibited by utilizing an array area formed by the aluminum
oxide isolation
layers, the
utilization rate of a reaction source is improved, and directional transmission of a
source material is driven by adjusting the
reaction temperature and air pressure and the inclination angle of a substrate, so that the reaction efficiency is improved. Therefore, large-scale, high-uniformity and high-quality auxiliary growth of the platinum
selenide film is realized. And the method can be further used for preparing a large-area integrated platinum
selenide heterojunction array device, and the process is compatible with a
CMOS (Complementary
Metal Oxide Semiconductor). The method is suitable for preparing similar
silicon metal chalcogenide, and a new thought is broadened for large-scale preparation of uniform
heterojunction devices.