Magnetron-sputtering winding coating machine capable of rapidly changing target and continuously and efficiently coating film in single-surface reciprocating manner
A technology of magnetron sputtering and coating machine, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating, etc. It can solve the problems of limited number of installations, influence of coating efficiency, long time required, etc., and achieve improvement Efficiency, flexible target change, and convenient control
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[0038] Such as figure 1 As shown, a magnetron sputtering roll-to-roll coating machine for rapid target-changing single-sided reciprocating continuous high-efficiency coating in this embodiment includes a vacuum chamber 1, an unwinding chamber 2, an unwinding mechanism 201 located in the unwinding chamber 2, and a winding chamber 9. The winding mechanism 901 arranged in the winding chamber 9 and the cold roller 8 arranged in the vacuum chamber 1 also include a deviation correction device 3, two or more turning target devices 10, and each turning The cathode chamber 11 with openings on both sides corresponding to the conversion target device 10 is provided with a gate valve 4 between the unwinding chamber 2 and the vacuum chamber 1, between the winding chamber 9 and the vacuum chamber 1, and is used to prevent the unwinding chamber 2 and the vacuum chamber 1. The gas in the winding chamber 9 enters the vacuum chamber 1 to avoid affecting the vacuum degree of the vacuum chamber 1...
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