A high-efficiency single-sided reciprocating continuous coating magnetron sputtering roll-to-roll coating machine

Abstract

The invention discloses a high-efficiency single-side reciprocating continuous-coating magnetron sputtering winding coating machine, belonging to the field of vacuum coating facilities. The coating machine comprises a vacuum chamber, a decoiling mechanism, a coiling mechanism, a cooling roll arranged in the vacuum chamber, correcting devices, two or more revolution target change devices, and cathode chambers which are correspondingly to the positions of the revolution target change devices and have openings on top and bottom, wherein one correcting device is respectively arranged between the decoiling mechanism and reversing rolls and between the coiling mechanism and reversing rolls; the cathode chambers are distributed on the circumferential surface of the baseband-coated cooling roll; a pole target seat board rotates to below the corresponding cathode chamber and extends outward, so that the target core is inserted into the cathode chamber; and the decoiling mechanism and coiling mechanism drive the baseband to reciprocate. The coating machine can implement target cathode replacement in time under the condition of not opening the coating vacuum chamber, and implement the coating of multiple films by utilizing the reciprocation of the substrate, thereby greatly enhancing the multilayer functional film coating efficiency of the coating machine. The coating machine has the advantages of compact structure and small occupied space.

Description

technical field [0001] The invention relates to a vacuum coating machine, more specifically, to a high-efficiency single-sided reciprocating continuous coating magnetron sputtering winding coating machine. Background technique [0002] Vacuum roll coating technology is a technology that prepares one or more layers of thin films with certain functions on the surface of the coil substrate by thermal evaporation or magnetron sputtering in a vacuum chamber. The vacuum winding coating equipment mainly has the following characteristics: first, the substrate to be coated is a flexible substrate, that is, it can be wound; second, the coating process is continuous, that is, the coating is carried out continuously within a working cycle; Third, the coating process is carried out in a high vacuum environment. During the unwinding and rewinding process of the winding coating machine, the surface of the substrate is coated with a thin film. The structure of the coating is the working pa...

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Problems solved by technology

[0004] In the cathode sputtering film-forming device, the winding-type vacuum coating equipment can obviously improve the film-forming efficiency because of its continuous production. However, in the existing winding-type vacuum coating equipment, for each The number of membrane cathode cells installed is limited, and the target material needs to be changed repeatedly for multi-layer dielectric film coating, and the vacuum needs to be pumped again after each target material change, which takes a long time and is cumbersome to operate, which seriously affects the coating efficiency; in addition, existing The winding vacuum coating equipment often needs to be used in conjunction with cleaning devices, heating devices, unwinding and winding mechanisms to form a production line, which will cause many equipment and occupy a large production area.

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