The invention discloses a high-efficiency magnetron
sputtering winding
coating machine capable of continuously
coating in a double-sided reciprocated way, belonging to the field of
vacuum coating equipment. The high-efficiency magnetron
sputtering winding
coating machine comprises a
vacuum chamber, an unrolling mechanism, a rolling mechanism, cooling rollers,
error correcting devices and rotary target replacing devices, wherein a base band arranged between the unrolling mechanism and the rolling mechanism is wound on the two groups of cooling rollers in an S shape after being reversed by using reversing rollers arranged in the
vacuum chamber, and the unrolling mechanism and the rolling mechanism are respectively provided with a group of
error correcting device; the base band coated
peripheral surface of each group of cooling roller is correspondingly provided with the two groups of rotary target replacing devices at least, and a group of small
cathode chamber provided with openings in two sides is arranged between each group of rotary target replacing device and the cooling roller corresponding to the rotary target replacing device; and the unrolling mechanism and the rolling mechanism drive the base band to reciprocate. By using the high-efficiency magnetron
sputtering winding coating
machine, targets can be replaced in time under the condition that the
vacuum chamber is not opened, and a plurality of double-sided film
layers are continuously coated by virtue of reciprocation design of the double cooling rollers and a base material, so that double-sided coating efficiency of the coating machine is greatly increased; and the high-efficiency magnetron sputtering winding coating machine is compact in structure and small in occupied space.