High-efficiency magnetron sputtering winding coating machine capable of continuously coating in double-sided reciprocated way

Abstract

The invention discloses a high-efficiency magnetron sputtering winding coating machine capable of continuously coating in a double-sided reciprocated way, belonging to the field of vacuum coating equipment. The high-efficiency magnetron sputtering winding coating machine comprises a vacuum chamber, an unrolling mechanism, a rolling mechanism, cooling rollers, error correcting devices and rotary target replacing devices, wherein a base band arranged between the unrolling mechanism and the rolling mechanism is wound on the two groups of cooling rollers in an S shape after being reversed by using reversing rollers arranged in the vacuum chamber, and the unrolling mechanism and the rolling mechanism are respectively provided with a group of error correcting device; the base band coated peripheral surface of each group of cooling roller is correspondingly provided with the two groups of rotary target replacing devices at least, and a group of small cathode chamber provided with openings in two sides is arranged between each group of rotary target replacing device and the cooling roller corresponding to the rotary target replacing device; and the unrolling mechanism and the rolling mechanism drive the base band to reciprocate. By using the high-efficiency magnetron sputtering winding coating machine, targets can be replaced in time under the condition that the vacuum chamber is not opened, and a plurality of double-sided film layers are continuously coated by virtue of reciprocation design of the double cooling rollers and a base material, so that double-sided coating efficiency of the coating machine is greatly increased; and the high-efficiency magnetron sputtering winding coating machine is compact in structure and small in occupied space.

Description

technical field [0001] The invention relates to a vacuum coating machine, more specifically, to a high-efficiency double-sided reciprocating continuous coating magnetron sputtering winding coating machine. Background technique [0002] Vacuum roll coating technology is a technology that prepares one or more layers of thin films with certain functions on the surface of the coil substrate by thermal evaporation or magnetron sputtering in a vacuum chamber. The vacuum winding coating equipment mainly has the following characteristics: first, the substrate to be coated is a flexible substrate, that is, it can be wound; second, the coating process is continuous, that is, the coating is carried out continuously within a working cycle; Third, the coating process is carried out in a high vacuum environment. During the unwinding and rewinding process of the winding coating machine, the surface of the substrate is coated with a thin film. The structure of the coating is the working pa...

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Problems solved by technology

[0004] In the cathode sputtering film-forming device, the winding-type vacuum coating equipment can obviously improve the film-forming efficiency because of its continuous production. However, in the existing winding-type vacuum coating equipment, for each The number of membrane cathode cells installed is limited, and the target material needs to be changed repeatedly for multi-layer dielectric film coating, and the vacuum needs to be pumped again after each target material change, which takes a long time and is cumbersome to operate, which seriously affects the coating efficiency; in addition, existing The winding vacuum coating equipment often needs to be used in conjunction with cleaning devices, heating devices, unwinding and winding mechanisms to form a production line, which will cause many equipment and occupy a large production area.

In addition, in some cases, it is necessary to coat both sides of the flexible substrate with a functional film. In this case, the structure of the coating machine will be more bloated, resulting in a larger equipment structure and a more complicated electrical control system.

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