A high-efficiency double-sided reciprocating continuous coating magnetron sputtering roll-to-roll coating machine

Abstract

The invention discloses a high-efficiency double-sided reciprocating continuous coating magnetron sputtering winding coating machine, which belongs to the field of vacuum coating equipment. The invention includes a vacuum chamber, an unwinding mechanism, a winding mechanism, two sets of cold rollers, a deviation correction device and a return conversion target device. The S” shape is wound on two sets of cold rolls, and a set of deviation correction devices are installed at the unwinding mechanism and the winding mechanism; each set of cold rolls is equipped with at least two sets of return conversion target devices on the circumferential surface covered with the base tape. A group of cathode chambers with openings on both sides are arranged between the rotary target device and the corresponding cold roller; the unwinding mechanism and the winding mechanism drive the base belt to reciprocate. The invention can replace the target material in time without opening the vacuum chamber, and utilizes the reciprocating motion design of the double cooling roller and the base material to realize the continuous coating of double-sided multi-layer films, which greatly improves the double-sided coating of the coating machine. High efficiency; compact structure, small footprint.

Description

technical field [0001] The invention relates to a vacuum coating machine, more specifically, to a high-efficiency double-sided reciprocating continuous coating magnetron sputtering winding coating machine. Background technique [0002] Vacuum roll coating technology is a technology that prepares one or more layers of thin films with certain functions on the surface of the coil substrate by thermal evaporation or magnetron sputtering in a vacuum chamber. The vacuum winding coating equipment mainly has the following characteristics: first, the substrate to be coated is a flexible substrate, that is, it can be wound; second, the coating process is continuous, that is, the coating is carried out continuously within a working cycle; Third, the coating process is carried out in a high vacuum environment. During the unwinding and rewinding process of the winding coating machine, the surface of the substrate is coated with a thin film. The structure of the coating is the working pa...

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Problems solved by technology

[0004] In the cathode sputtering film-forming device, the winding-type vacuum coating equipment can obviously improve the film-forming efficiency because of its continuous production. However, in the existing winding-type vacuum coating equipment, for each The number of membrane cathode cells installed is limited, and the target material needs to be changed repeatedly for multi-layer dielectric film coating, and the vacuum needs to be pumped again after each target material change, which takes a long time and is cumbersome to operate, which seriously affects the coating efficiency; in addition, existing The winding vacuum coating equipment often needs to be used in conjunction with cleaning devices, heating devices, unwinding and winding mechanisms to form a production line, which will cause many equipment and occupy a large production area.

In addition, in some cases, it is necessary to coat both sides of the flexible substrate with a functional film. In this case, the structure of the coating machine will be more bloated, resulting in a larger equipment structure and a more complicated electrical control system.

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