Process and production equipment for manufacturing rotary target material through cold spraying

Abstract

The invention discloses a process and production equipment for manufacturing a rotary target material through cold spraying. The process comprises the following steps of 1) sequentially carrying out ultrasonic cleaning, drying and sand blasting treatment on a base body; (2) vacuumizing the area where the base body is located; (3) introducing ITO powder into a spray gun, and meanwhile, introducing inert gas into the spray gun; and 4) driving and controlling the base body to rotate, and controlling the spray gun to move in the axial direction of the base body, so that the ITO target material is formed. According to the ITO target material prepared through the steps, due to the fact that the ITO target material is always in the helium protection atmosphere during spraying, the oxygen content and mixing of other impurities are reduced, in addition, when the target material is subjected to cold spraying, particles collide with the base body at a high speed and sufficiently deform to form a coating, the coating structure is compact, the relative density of the target material can reach 99.9% or above, the grain structure in the target material is uniform and fine, no defect structure exists, meanwhile, the deposition efficiency is high, and the production cost is reduced.

Description

technical field [0001] The invention relates to the technical field of rotating target processing, in particular to a process for manufacturing rotating targets by cold spraying and production equipment thereof. Background technique [0002] Rotating targets are magnetron targets. The target is made into a cylindrical shape, with a stationary magnet inside, which rotates at a slow speed. The advantage is that the utilization rate is as high as 70%, and the disadvantage is that the cost is high. Used in solar cells, architectural glass, automotive glass, semiconductors, flat-panel TVs, etc. [0003] Most of the existing rotating targets are processed by cold spraying. The main operation is to spray the target material onto the surface of the substrate through high-pressure gas. The raw material is sprayed to a cylindrical shape. [0004] During the processing of the existing target material, the connection between the substrate and the target material is not tight, and it ...

AI Technical Summary

Problems solved by technology

[0004] During the processing of existing targets, the connection between the substrate and the target is not tight, and it is often prone to detachment after processing, which is inconvenient to use

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