A support platform for cryogenic vacuum chamber
A low-temperature vacuum, supporting platform technology, applied in the field of supporting platform, can solve the problems of environmental temperature change and deformation, and achieve the effect of low production cost and convenient and fast production.
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Embodiment 1
[0020] see Figure 1-Figure 2 As shown, a support platform for a low-temperature vacuum chamber, which includes a vacuum cryogenic chamber 1, four support legs 2, and an optical platform 3, the optical platform 3 is accommodated in the vacuum low-temperature chamber 1, each One end of the supporting leg 2 is fixed on the lower surface of the optical table 3, and the other end of the supporting leg 2 passes through the wall of the vacuum low-temperature cooling chamber 1 and touches the ground;
[0021] The outer wall of each supporting leg 2 exposed outside the vacuum low-temperature cooling chamber 1 is provided with a sealing bellows 4, one end of the sealing bellows 4 is in contact with the outer wall of the vacuum low-temperature cooling chamber 1, and the other end of the sealing bellows 4 is in contact with the outer wall of the vacuum low-temperature cooling chamber 1. connected to the ground;
[0022] A temperature sensor 5 is fixedly installed at the center of the lo...
Embodiment 2
[0027] A support platform for a low-temperature vacuum chamber, which is different from Embodiment 1 in that the upper surface of the first heat-insulating metal cover 9 and the upper part of its circumferential side wall are sleeved with a second heat-insulating Pad 8, the second heat insulating pad 8 is externally contacted with a second heat insulating metal cover 9, the second heat insulating metal cover 9 is the same shape as the first heat insulating pad 8, and the size matches, and the second heat insulating metal cover The lower end of the cover body 9 extends downward, and is suspended adjacent to the inner wall of the vacuum low-temperature cold chamber 1, and the inner surface of the second heat-insulating metal cover body 9 is polished.
[0028] The annular heating plate 6 is arranged at the middle position between the temperature sensor 5 on the lower surface of the optical platform 3 and the outer edge of the lower surface of the optical platform 3 .
[0029] The...
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