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Sub-micron grade precision lifting device

A sub-micron level, lifting device technology, applied in the field of micro-displacement, can solve the problems of complex structure and high cost of precision micro-displacement devices, and achieve the effects of increasing work reliability and service life, improving displacement resolution, and improving flexibility.

Active Publication Date: 2015-06-03
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0014] To sum up, so far, the structures of precision micro-displacement devices that can output sufficient power are relatively complex, and involve auxiliary control systems, and the cost is relatively high

Method used

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  • Sub-micron grade precision lifting device
  • Sub-micron grade precision lifting device
  • Sub-micron grade precision lifting device

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0036] Specific implementation mode one: as Figure 1~Figure 5 As shown, the submicron-level precision lifting device includes a base 1, a screw mechanism, a wedge mechanism and a locking mechanism; the screw mechanism includes a differential head support 7, a needle roller guide 8, a coupling 9, a differential Head 10 and differential head locking collar 11; the wedge mechanism includes a Z-direction slider 14, an X-direction rolling guide rail one 15, an X-direction rolling guide rail slider one 16, a slider connecting plate 17, and an X-direction slider 18. X-direction rolling guide rail 2 19 and X-direction rolling guide rail slider 2 20; the locking mechanism includes two ball guide bushes 2, two guide rod locking collars 4, and two guide rod locking brackets 5 And two lifting guide rods 6;

[0037] The X-direction rolling guide rail 15 is fixed on the base 1, and the X-direction rolling guide rail slider 16 is slidingly connected with the X-direction rolling guide rail ...

specific Embodiment approach 2

[0041] Specific implementation mode two: as image 3 and Figure 5 As shown, the sub-micron level precision lifting device described in Embodiment 1, the guide rod locking collar 4 and the guide rod locking bracket 5 are connected by locking screws 3 to connect the guide rod locking collar 4 fixed.

specific Embodiment approach 3

[0042] Specific implementation mode three: as Figure 5 As shown, the submicron precision lifting device described in the first specific embodiment, the submicron precision lifting device also includes an upper protective cover 12 and a lower protective cover 13; the lower protective cover 13 is connected to the side of the base 1 The wall is fixed, the wedge mechanism, the locking mechanism and the differential head support 7, the needle guide 8, the coupling 9, the differential head locking collar 11 and the output rod of the differential head 10 in the screw mechanism All are arranged in the lower protective cover 13 , the upper end of the lower protective cover 13 is provided with the upper protective cover 12 , and the upper protective cover 12 is fixedly connected to the side wall of the Z-direction slider 14 . The effect of the technical solution is: the device can be closed, dust can be prevented from entering, and maintenance is easy.

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Abstract

The invention discloses a sub-micron grade precision lifting device and belongs to the technical field of micrometric displacement. The sub-micron grade precision lifting device is high in sensitivity, simple in structure, convenient to adjust and low in cost and can reach the sub-micron precision. A guide rod locking bracket and an X direction rolling guide rail 1 connected with an X direction rolling guide rail sliding block in a sliding mode are fixed on a base, a ball bearing guide bushing is arranged in a mounting hole of the base, a guide rod locking sleeve ring is fixed in the guide rod locking bracket, an X direction sliding block is fixedly connected with an X direction rolling guide rail sliding block 1 and a sliding block connection plate, and the X direction sliding block is connected with a roller pin guider; an X direction rolling guide rail 2 connected with an X direction rolling guide rail sliding block 2 in a sliding mode is fixedly connected with a Z direction sliding block, the X direction rolling guide rail sliding block 2 is fixedly connected with the sliding block connection plate, the Z direction sliding block is fixedly connected with a lifting guide rod, the lifting guide rod is matched with the ball bearing guide bushing and the guide rod locking sleeve ring; a micrometer head is locked by a micrometer head locking sleeve ring mounted in a micrometer head support, and the micrometer head is connected with the roller pin guider through a coupler. The sub-micron precision lifting device is applied to the sub-micron lifting occasion.

Description

technical field [0001] The invention relates to a submicron-level lifting device, which belongs to the technical field of micro-displacement. Background technique [0002] As one of the key technologies of precision machinery and precision instruments, micro-displacement technology has developed rapidly in recent years with the development of electronic technology, aerospace, bioengineering and other disciplines. Especially with the development of microelectronics technology towards large-scale integrated circuits and ultra-large-scale integrated circuits and the research of micro-mechanics, micro-displacement mechanisms have been developed rapidly and widely used. Especially in the fields of optical and electronic engineering, precision engineering, aerospace technology, bioengineering, microelectronic systems, nanotechnology, etc., people have higher and higher requirements for the resolution and accuracy of precision machinery and precision instruments. The core componen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
Inventor 李增强宋雨轩孙涛胡振江赵学森
Owner HARBIN INST OF TECH