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Adjustable light source device and precision measuring equipment including the device

A light source device and precision measurement technology, applied in the direction of using optical devices, components of lighting devices, cooling/heating devices of lighting devices, etc., can solve problems such as inability to effectively prevent heat, improve cooling reliability, and improve stability performance, size and weight reduction

Active Publication Date: 2017-08-22
RAINTREE SCI INSTR SHANGHAI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this heat dissipation method still has heat convection and heat radiation between the light source and the heat-sensitive components of the measurement system, so it cannot effectively prevent heat from entering the measurement system from the light source

Method used

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  • Adjustable light source device and precision measuring equipment including the device
  • Adjustable light source device and precision measuring equipment including the device
  • Adjustable light source device and precision measuring equipment including the device

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Embodiment Construction

[0032] As required, specific embodiments of the invention will be disclosed herein. However, it should be understood that the embodiments disclosed herein are merely typical examples of the invention, which can be embodied in various forms. Therefore, specific details disclosed herein are not to be considered limiting, but merely as a basis for the claims and as a representative basis for teaching one skilled in the art to variously employ the invention in any appropriate way in practice, This includes taking various features disclosed herein and combining features that may not be expressly disclosed herein.

[0033] It should be noted that, herein, the directional representations used to explain the structures and actions of various parts of the disclosed embodiments, such as up, down, left, right, front, back, etc., are not absolute but relative of. These representations are appropriate when various parts of the disclosed embodiments are located in the locations shown in t...

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Abstract

The invention provides an adjustable light source device and precision measuring equipment including the device, including: a cooling base, a multi-dimensional adjustment frame, a light source and a movable insulating and heat-insulating connection assembly. The cooling base includes a shell, a partition that divides the inner chamber into a cold chamber and a hot chamber, a cold chamber door and a hot chamber door, and an adjustment channel is arranged on the partition; the multi-dimensional adjustment frame is located in the cold chamber and placed on the partition; The light source is located in the thermal cavity and connected to the external power supply; the movable insulating and heat-insulating connection assembly runs through the adjustment channel and extends in the cold cavity and the hot cavity, one end of which is connected with the multi-dimensional adjustment frame, and the other end is connected with the light source; the sealing mechanism of the adjustment channel is set as One end of the adjustment channel is connected with the movable insulation and heat insulation connection assembly and kept closed; the housing also has a light outlet to lead the light beam emitted by the light source out of the housing. The invention realizes the real-time positioning and adjustment of the light source and effectively prevents the thermal impact of the light source on the thermal sensitive components of the measurement system in the precision measurement equipment.

Description

technical field [0001] The invention relates to precise adjustment and positioning of high-heating light sources in precision measurement or processing equipment, and is especially suitable for energy source adjustment and precise positioning of semiconductor large-scale integrated circuit manufacturing and measurement equipment. Background technique [0002] In many precision measurement equipment, it is necessary to adjust the position of the light source with high calorific value to form the required optical path, and inside the equipment, the measurement system is often sensitive to thermal shock. Therefore, when using these light sources, it is necessary to prevent heat from The light source enters the measurement system. [0003] In the existing precision measurement equipment, the usual heat dissipation method is to air-cool the light source, that is, an airflow path is formed inside the device, and the heated air is taken away by blowing to the light source through, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/06F21V17/00F21V29/503F21V29/56
Inventor 马涛高海军刘军凯
Owner RAINTREE SCI INSTR SHANGHAI
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