substrate fixing device

Abstract

A substrate fixing apparatus includes a metal frame body. A central portion of the metal frame body is provided with a through hole; a recess configured for bearing a substrate is formed on the metal frame body along an edge of the through hole; the recess is recessed towards an inside of the metal frame body along a thickness direction of the metal frame body; and a first insulating pad is disposed at the bottom of the recess.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a display substrate fixing device. Background technique [0002] At present, in the production process of display substrates such as color filter substrates, when the ITO film is coated on the display substrate, due to the needs of sputter coating equipment, the display substrate needs to be hung vertically on the metal frame and sent to the sputter coating equipment. In this way, the coating can be completed. [0003] However, in actual production, the inventors of the present application have found that the material of the ITO film plated in the sputter coating process is easy to fall into the gap between the substrate and the metal frame carrying the substrate, and the ITO film falling into the gap The material is easy to directly conduct the ITO film and the metal frame during the sputtering coating process, resulting in abnormal discharge phenomenon, which in turn affects ...

AI Technical Summary

Problems solved by technology

[0003] However, in actual production, the inventors of the present application have found that the material of the ITO film plated in the sputter coating process is easy to fall into the gap between the substrate and the metal frame carrying the substrate, and the ITO film falling into the gap The material is easy to directly conduct the ITO film and the metal frame during the sputtering coating process, resulting in abnormal discharge phenomenon, which affects the coating effect

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