Suspension shakeproof equipment and method

An equipment and anti-vibration technology, applied in protection devices, buildings, infrastructure engineering, etc., can solve problems such as limited efficiency, reduce damage and damage, improve vibration isolation effect, and improve stability.

An equipment and anti-vibration technology, applied in protection devices, buildings, infrastructure engineering, etc., can solve problems such as limited efficiency, reduce damage and damage, improve vibration isolation effect, and improve stability.

CN104746527AActive Publication Date: 2015-07-01SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Suspension shakeproof equipment and method
  • Suspension shakeproof equipment and method
  • Suspension shakeproof equipment and method

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Embodiment Construction

[0029] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0030] The existing technical solution for the foundation of traditional lithography machines, as shown in the technical solution introduced in the background art, is a foundation designed to isolate the transmission of small energy mechanical vibrations (such as the walking of operators and external ground disturbances). It is surrounded by air isolation grooves, and the bottom is equipped with vibration-absorbing materials (such as rubber, etc.). This kind of foundation does not have the function of vibration isolation and protection for lithography equipment under the conditions of large energy and large displacement in earthquakes.

[0031] The invention proposes a design scheme with early warning and suspension anti-seismic lithography machine (or valuable equipment) to protect the foundation. It has two working states. In the normal wor...

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Abstract

The invention discloses suspension shakeproof equipment. The equipment comprises a shakeproof suspension table which has a rigid working state and a flexible shakeproof suspension working state. The shakeproof suspension table comprises a shake isolation cavity which is filled with media, and a mounting foundation is arranged on the media. A protected device is connected with the mounting foundation to be placed on the shakeproof suspension table, and under the rigid working state, the protected device is in rigid connection to the bottom of the shake isolation cavity; and under the flexible shakeproof suspension working state, the protected device is separated from the bottom of the shake isolation cavity.

Description

technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a suspension shockproof equipment and method. Background technique [0002] In the current state of technology, earthquakes can be considered virtually unpredictable. The main reason for earthquakes is plate tectonics. The direct effect of plate tectonic operation is to generate elastic force at the epicenter or place, and the elastic force propagates through the crust (the propagation form is seismic longitudinal wave or primary wave and shear wave or secondary wave. ). When these elastic forces reach the ground, at the earth / air interface or the earth / water interface. Surface forces of different intensities or wavelengths (in the form of Love, Rayleigh, Long or L waves) develop. The surface waves generated by earthquakes are the most destructive, and they act on the building structure both in the horizontal direction and in the vertical direction...

Claims

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Application Information

Patent Timeline
01 Jul 2015
Publication
CN104746527A
IPC
E02D27/34; E02D27/44; E02D31/08
Inventors
吴飞