4results about How to "Load large" patented technology

The application provides a semiconductor processing equipment and a substrate posture adjusting device and method thereof; the substrate posture adjusting device is provided with a mover plate, a bearing plate and a center column connected between the two, and is also provided with a plurality of linear actuators and a plurality of hook hinges each having three rotation degrees of freedom; each linear actuator is used for driving a moving part of the linear actuator to move linearly along an actuating direction of the linear actuator; the moving part of each linear actuator is connected with the mover plate through a corresponding hook hinge; the strokes of the moving parts when moving linearly can be independently adjusted; by matching the stroke positions of the moving parts, the mover plate can be in an inclined state, and the bearing plate and a substrate supported by the bearing plate can be inclined through the center column, so that the adjustment of the inclination of the substrate is realized, and the uniformity during the processing of the surface of the substrate is optimized.

The application discloses an ultrahigh-vacuum-compatible high-precision nanoradian rotary table and a nanoradian angle output method, and belongs to the technical field of precise adjustment equipment. The rotary table is composed of a rotary seat assembly, a driving assembly, a displacement transmission assembly and an angle output rotary hinge. The driving assembly and the displacement transmission assembly are cores. The nanometer displacement of a piezoelectric actuator is scaled and amplified by a displacement driving hinge, driving force is accurately transmitted through the displacement transmission assembly, and linear displacement is converted into nanoradian rotation through the angle output rotary hinge. The titanium alloy material of the rotary table is suitable for an ultrahigh-vacuum environment, and the piezoelectric actuator is combined to realize overall power-off self-locking. Under a 5kg load, a minimum rotation step of 10nrad and a rotation stroke of 200μrad can be realized, and the problems of poor load, no self-locking, unsuitable vacuum and low rotation precision of existing rotary tables are solved. The structure has high rigidity and stability, and closed-loop control can also be realized.

The utility model relates to the technical field of core drilling, especially to a gearbox for core drilling machine. The gearbox comprises a box body, an input shaft, an intermediate rotating shaft, an output shaft and a shift fork mechanism. The input shaft is provided with a driving gear. The intermediate rotating shaft is provided with a driven gear, a clutch gear and an inner-outer connecting gear in sequence from top to bottom. The driving gear and the driven gear are in mesh with each other. The clutch gear rotates with the intermediate rotating shaft and moves up and down along the axial direction of the intermediate rotating shaft. The inner surface of the inner-outer connecting gear towards the clutch gear end is provided with internal teeth, and the outer surface of the inner-outer connecting gear away from the clutch gear end is provided with external teeth. The output shaft is provided with a second gear and a first gear in sequence from top to bottom along the axial direction. The shift fork mechanism drives the clutch gear to move up and down along the axial direction of the intermediate rotating shaft. The gearbox can switch the output shaft between low-speed rotation and high-speed rotation, so that the drill rod can meet various working requirements of low-speed heavy load and high-speed light load, and the working range of the drilling machine is improved.