Function-transferring object, method for transferring functional layer, package and function-transferring film roll
A technology of transfer body and functional layer, applied in the direction of lamination device, chemical instrument and method, lamination, etc.
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Embodiment 1
[0557] Using a functional transfer body, a mask function for nanofabrication of an object to be processed is imparted on the object to be processed, and the object to be processed is processed using this function. Here, as one of the effects of the functional transfer body, the accuracy of the functional layer was evaluated. Specifically, it is performed as follows.
[0558] (a) Fabrication of cylindrical master mold
[0559] Cylindrical quartz glass is used as the base material of the cylindrical master mold, and nanostructures are formed on the surface of the quartz glass by direct writing photolithography using a semiconductor laser. First, the quartz glass surface is thoroughly washed to remove particles. Next, a photoresist layer was formed on the surface of the quartz glass by a sputtering method. In the sputtering method, a φ3-inch CuO (containing 8 atm % Si) was used as a target (resist layer), and a 20-nm resist layer was formed by RF power of 100 W. Next, while r...
Embodiment 2
[0614] Using the carrier G2 described in Table 1 produced in Example 1, a functional layer different from that in Example 1 was transferred onto the object to be processed, and then the object to be processed was nanofabricated. In addition, in Example 2, the function-imparting layer was partially transferred to the object to be processed.
[0615] For the carrier G2, the first functional layer included in the nanostructure region is formed into a film, and then the second functional layer included in the non-nanostructure region is further formed into a film.
[0616] (c) Fabrication of functional transfer bodies
[0617] First, the functional coating liquid 2 is formed into a film on the nanostructure surface of the carrier G2, and the first functional layer is provided.
[0618] Functional coating solution 2...Mixed n-butyl titanium (IV) acid monomer (manufactured by Wako Corporation): 3-acryloyloxypropyltrimethoxysilane (KBM5103, manufactured by Shin-Etsu Silicone Co., Lt...
Embodiment 3
[0643] The purpose of Example 3 is to confirm whether a function completely different from the mask function of Example 1 and Example 2 can be transferred to the object to be processed. In this case, since the composition of the functional layer is different, it was investigated whether the accuracy of the functional layer as a functional transfer body can be ensured like Example 1 and Example 2 even when the composition of the functional layer is different. , transfer the functional layer to the object to be processed.
[0644] Using the same method as described in Example 1, a plurality of arrayed nanostructures in which recesses with a pitch of 200 nm, an opening diameter of 180 nm, and a depth of 300 nm were hexagonally closest to each other were produced. The ratio (Es / Eb) of carrier G2 was 37. A PET film with a thickness of 50 μm was used as the supporting substrate of the carrier G2. On the carrier G2, a functional layer having a waterproof function is formed to produ...
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Abstract
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