Control mechanism for rapid deflection reflection mirror with rotation center arranged at reflection surface and method thereof

Abstract

The invention provides a control mechanism for a rapid deflection reflection mirror with the rotation center arranged at the reflection surface and a method thereof. The control mechanism comprises a first driving mechanism and a third driving mechanism which are arranged at the two ends of an X-axis of deflection and symmetrical about a Y-axis of deflection, and a second driving mechanism and a fourth driving mechanism which are arranged at the two ends of the Y-axis of deflection and symmetrical about the X-axis of deflection. The first driving mechanism is connected with a mirror supporting structure via a first flexible hinge perpendicular to the first driving mechanism. The structure and the size of the second driving mechanism, the third driving mechanism and the fourth driving mechanism are identical to those of the first driving mechanism, and the second driving mechanism, the third driving mechanism and the fourth driving mechanism are connected with the mirror supporting structure via a second flexible hinge, a third flexible hinge and a fourth flexible hinge respectively. The side surface of the reflection mirror is fixed on the mirror supporting structure. The mirror surface of the reflection mirror and the X-axis of deflection and the Y-axis of deflection are arranged in the same plane. The invention also provides a control method of the control mechanism. The control mechanism has relatively large deflection range and also has the characteristics of high response speed, small size and low weight.

Description

technical field [0001] The invention belongs to the technical field of light beam control, and in particular relates to a control mechanism and method for a fast deflecting mirror whose rotation center is located on a reflecting surface. Background technique [0002] In recent years, with the rapid development of microelectronics technology, bioengineering, aerospace engineering and other disciplines, two-dimensional fast deflecting mirrors have become increasingly important and widely used in astronomical telescopes, image stabilization, compound axis precision tracking, and aiming optical systems. In the above application system, in order to obtain good compensation, tracking and control effects, it is required that the fast deflection control mechanism of the beam must have high angular deflection sensitivity and fast response capability. Piezoelectric materials have the characteristics of high displacement output precision, small size, and low energy consumption. However...

AI Technical Summary

Problems solved by technology

Piezoelectric materials have the characteristics of high displacement output precision, small size, and low energy consumption. However, due to the small displacement output range, the current two-dimensional fast deflection mirror control mechanism of piezoelectric materials generally has the disadvantage of too small deflection range. Moreover, there is often a distance between the center of rotation of the mirror and the upper surface (reflection surface) of the mirror, which will cause errors in the optical system

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