Display apparatus with stiction reduction features
A viscous force, equipment technology, applied in the input/output of user/computer interaction, instruments, image reproducers using projection devices, etc., can solve problems such as inoperability
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[0047] Certain electromechanical systems (EMS) devices, such as nanoelectromechanical systems (NEMS), microelectromechanical systems (MEMS), or larger devices, include movable components configured to move in a plane parallel to one or more planar surfaces. Many EMS devices incorporating such components face the possibility of the components permanently sticking to other surfaces due to out-of-plane motion, thereby bringing the components into contact with other surfaces. This movement may occur due to a buildup of electrostatic charge acting on the movable component or due to mechanical shock or other forces. The movable component may be in contact with the substrate on which the EMS device is fabricated, other planar surfaces fabricated on the substrate above the EMS device, or the surface of an opposing substrate positioned adjacent to the movable component. In other cases, movable components of an EMS device that are generally positioned in a common plane can become entang...
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