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Reference unit for reading electronic fuse

A reference cell, electronic fuse technology, applied in read-only memory, information storage, static memory, etc., can solve the problem of unavailability of the array, and achieve the effect of improving yield, increasing tolerance, and improving reliability

Inactive Publication Date: 2015-09-02
WUHAN XINXIN SEMICON MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Generally, the electric fuse array contains thousands of electronic fuses, and the failure of any electronic fuse will cause the entire array to be unavailable

Method used

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  • Reference unit for reading electronic fuse

Examples

Experimental program
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Effect test

Embodiment Construction

[0026] refer to figure 1 , a structural schematic diagram of a reference unit for reading electronic fuses according to the present invention, the reference unit is connected to a comparison unit connected with electronic fuses, and the reference unit includes several parallel row units.

[0027] Wherein, each row unit includes several resistors 1 connected in series in sequence, the resistors of the row unit are connected in series through the metal connection wire 2, and the row unit is directly isolated from the row unit adjacent to it by the insulating layer 3; The size of the resistance value between the reference unit and the reference unit to read the electronic fuse.

[0028] Preferably, the electronic fuse is an array composed of several electronic fuse units.

[0029] Preferably, the reference unit is a square array composed of several resistors.

[0030] Preferably, the number of resistors in each row unit is 4 to 20 (such as 4, 8, 12, 20, etc.), and in this embod...

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PUM

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Abstract

The invention relates to the technical field of semiconductor manufacturing, and particularly relates to a reference unit for reading an electronic fuse. A plurality of resistors with the same size and the same material are connected in series to form a line unit, and a plurality of line units are connected in parallel to form a reference unit. Through the technical scheme, the stability of the reference unit is increased, and the tolerance of the reference unit to defects is increased, thereby increasing the yield; additionally, the stability of the reference unit is enhanced, so that the electronic fuse with faults is tested, thereby increasing the reliability of a product.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a reference unit for reading electronic fuses. Background technique [0002] In the prior art, when reading electronic fuses, an unsalicide poly (polysilicon material, no metal growth layer on polysilicon) resistor is used as a reference unit, and each electronic fuse corresponds to a reference unit and a differential circuit. The difference between the "0" / "1" state is displayed by comparing the size of the electronic fuse and the resistance of the reference unit through a differential circuit. [0003] One electronic fuse corresponding to one reference cell will result in a very large chip area. A common practice in the industry is to divide the electronic fuse into several modules, and each module corresponds to a reference unit. Through this method, the area of ​​the chip is greatly reduced. [0004] Generally, an electric fuse array includes thousands o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G11C17/16
Inventor 黄雪靑
Owner WUHAN XINXIN SEMICON MFG CO LTD
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