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Real time dispatch system-based method and system for wafer batch dispatch under machine set

A wafer batch and real-time dispatching technology, applied in the general control system, control/regulation system, comprehensive factory control, etc., can solve the problem of wasting the production capacity of crane production assistants and reduce the probability of dispatch errors , the effect of improving production efficiency

Active Publication Date: 2015-10-14
SEMICON MFG INT (SHANGHAI) CORP
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Problems solved by technology

This greatly wastes the production capacity of the crane and the manufacturing plant (FAB) as well as the production capacity of the production assistants

Method used

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  • Real time dispatch system-based method and system for wafer batch dispatch under machine set
  • Real time dispatch system-based method and system for wafer batch dispatch under machine set
  • Real time dispatch system-based method and system for wafer batch dispatch under machine set

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Embodiment Construction

[0040] The invention provides a wafer batch dispatching method under a machine group based on a real-time dispatching system.

[0041] Such as figure 1 Shown, the inventive method mainly comprises the following steps:

[0042] Step 1. Based on valid machine information and online wafer batch data, set the number of load ports for each machine in a machine group, the real-time delivery rules for each machine, and the dispatching rules for each machine. The scheduled time specification for each wafer lot shipped to the machine;

[0043] Step 2. Obtain real-time information on the wafer batches being processed by each machine, and calculate an estimated subsequent period of time based on the number of load ports on each machine and the information on the wafer batches being processed by each machine The idle sequence of each machine in the machine;

[0044] Step 3. Update the real-time delivery rules of each machine in turn according to the idle sequence, and obtain the delive...

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Abstract

The invention provides a real time dispatch system-based method and system for wafer batch dispatch under a machine set. The method comprises steps of setting the number of load ports of each machine under a machine set, the real time dispatch rule of each machine, and the preset time specification of each wafer batch dispatched to a corresponding machine according to effective machine information and online wafer batch data; timely obtaining information of a wafer batch which is currently processed by each machine, and calculating an idle sequence of the machines within a follow-up period of estimated time according to the number of the load ports of each machine and the information of the wafer batch which is currently processed by each machine; and sequentially updating the real time dispatch rule of each machine according to the idle sequence, and obtaining a dispatch result of each machine according to the update real time dispatch rule. According to the invention, a phenomenon that machines under the same machine set preorder the same wafer batch during preordering of wafer batches can be prevented.

Description

technical field [0001] The invention relates to the field of semiconductor production, in particular to a wafer batch dispatching method and system under a machine group based on a real-time dispatching system. Background technique [0002] In semiconductor manufacturing and production, due to the complexity of the production process and its processes, the machines used for the process are also different. Different machines or machine groups can process a variety of wafer batches with different attributes. The batches of wafers that can be assigned to different machines under the same machine group are also different. [0003] At present, the vast majority of wafer manufacturing factories have adopted the Real Time Dispatch (RTD for short) system to be responsible for online dispatching. The implementation of the dispatching system can use the built-in algorithm to formulate a more reasonable dispatching result for the wafer batches on the line. The production assistant (MA...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418
CPCG05B19/41865Y02P90/02
Inventor 赵晨谭小兵
Owner SEMICON MFG INT (SHANGHAI) CORP
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