Crystal pulling furnace with turnover device

Abstract

The invention relates to equipment in the technical field of semiconductor refrigeration piece production, in particular to a crystal pulling furnace with a turnover device. The crystal pulling furnace comprises a furnace body. The furnace body is installed on a frame. A furnace cavity is arranged inside the furnace body. A heating device and a plurality of clamping pieces clamping crystal pulling pipes are arranged inside the furnace cavity. A heating device can heat the crystal pulling pipes. The two ends of the furnace body are provided with a plurality of sets of shaft holes corresponding to the clamping pieces. First rotating shafts are installed behind the clamping pieces and penetrate through the shaft holes. Small gears are arranged outside the first rotating shafts. A rotating wheel is arranged on the outer side of the end of the furnace body and installed on the frame through the rotating shafts. The rotating wheel is connected with a first power device. A large gear ring is arranged on the inner side of the rotating wheel and meshed with the small gears. The crystal pulling furnace has the advantages of heating the positions of the crystal pulling pipes evenly without overturning and good in crystal pulling effect.

Description

technical field [0001] The invention relates to equipment in the technical field of semiconductor refrigerator production, in particular to a crystal pulling furnace. Background technique [0002] Crystal grains are the components used to manufacture semiconductor refrigeration parts. The main component of grains is bismuth tritelluride. As the crystal grains used to manufacture refrigeration parts, their molecules must be arranged neatly. The higher the efficiency. [0003] Crystal grains are cut from ingots, which requires that the molecular arrangement in the ingots be neat. [0004] When manufacturing crystal ingots, the process of arranging the molecules inside is crystal pulling. Crystal pulling is carried out in a crystal pulling furnace, and the raw materials are placed in the crystal pulling tube. It is beneficial to pull the crystal pulling tube in a balanced environment during crystal pulling. The effect of crystal pulling. [0005] The crystal pulling furnace ...

AI Technical Summary

Problems solved by technology

[0005] The crystal pulling furnace has a furnace chamber, and there is a clip for placing the crystal pulling tube in the furnace cavity. When pulling the crystal, the clip is clamped to pull the crystal tube; It will rotate, so that during the crystal pulling process, the position of the crystal pulling tube in the furnace cavity is not fixed, which has the disadvantage of poor crystal pulling effect

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