A kind of quartz glass crucible and preparation method thereof

A quartz glass crucible and crucible technology, applied in glass manufacturing equipment, glass molding, chemical instruments and methods, etc., can solve problems such as uneven distribution of cristobalite crystal layers, thickness of cristobalite crystal layers, and falling off of quartz crystal layers. Achieve the effect of good crystal pulling effect, high dislocation-free ratio and uniform distribution

Active Publication Date: 2016-03-23
ADVANCED QUARTZ MATERIAL (HANGZHOU) CO LTD
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0009] The object of the present invention is to provide a quartz glass crucible and a preparation method thereof, so as to solve problems such as the falling off of the quartz crystal layer on the inner surface of the crucible, uneven distribution of the cristobalite crystal layer or thick cristobalite crystal layer. The problem of adverse effects of crystals

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of quartz glass crucible and preparation method thereof
  • A kind of quartz glass crucible and preparation method thereof
  • A kind of quartz glass crucible and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] Put 25Kg of natural quartz sand into a rotating 20-inch crucible mold, form the natural quartz sand into a quartz crucible shape by centrifugal force, and then pass a strong current to the electrode above the mold, and then instantly form a temperature >2000°C in the mold. The high-temperature state electric arc slowly melts the quartz sand into the quartz crucible matrix. After the quartz crucible matrix is ​​melted and formed, adjust the position of the feeding tube, and 417g of synthetic quartz sand doped with alkaline earth metal barium 400ppm (predicted thickness b = 500μm, the estimated inner surface area of ​​the coated bottom s=3500cm 2 , density ρ=1.4g / cm 3 , take the coefficient K=1.7), evenly put it into the bottom inner surface of the quartz glass crucible substrate at a speed of 100g / min, after the feeding is completed and the melting is completed, the crucible is taken out after cooling, and the transparent The quartz glass crucible with the coating (theo...

Embodiment 2

[0044] Put 25Kg of natural quartz sand into a rotating 20-inch crucible mold, form the natural quartz sand into a quartz crucible shape by centrifugal force, and then pass a strong current to the electrode above the mold, and then instantly form a temperature >2000°C in the mold. The electric arc in the high-temperature state slowly melts the quartz sand into the quartz crucible matrix. After the quartz crucible matrix is ​​melted and formed, adjust the position of the feeding tube, and put 375g of synthetic quartz sand doped with alkaline earth metal barium 400ppm (expected thickness b = 450μm, the expected coated wall inner surface area s = 3500cm 2 , density ρ=1.4g / cm 3 , taking the coefficient K=1.7), and evenly put it into the inner surface of the wall of the quartz glass crucible substrate at a speed of 100g / min. After the feeding and melting are completed, the crucible is taken out after cooling, and the transparent The quartz glass crucible with the coating (theoretic...

Embodiment 3

[0046] Put 25Kg of natural quartz sand into a rotating 20-inch crucible mold, form the natural quartz sand into a quartz crucible shape by centrifugal force, and then pass a strong current to the electrode above the mold, and then instantly form a temperature >2000°C in the mold. The electric arc in the high temperature state slowly melts the quartz sand into the quartz crucible matrix. After the quartz crucible matrix is ​​melted and formed, adjust the position of the feeding tube, and use 666g of synthetic quartz sand doped with 600ppm of alkaline earth metal barium of type c to 100g / Evenly put into the entire inner surface of the quartz glass crucible substrate at a speed of 1 minute. After the feeding is completed and the melting is completed, the crucible is taken out after cooling to obtain a quartz glass with a transparent coating (theoretical thickness is 400 μm) doped with barium on the inner surface. The crucible is compared with the comparative example, and the anal...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to view more

Abstract

Disclosed are a quartz glass crucible and a method for manufacturing the same. The basal body of the crucible is coated with a transparent coating layer on its inner surface and the theoretical thickness of the layer is 50-500µm. The transparent coating layer is prepared by melting quartz sand doped with an alkali earth metal element which may be Mg, Ba, Sr or Ca. The alkali earth metal element is from barium oxide, a base of the alkali earth metal, a salt of the alkali earth metal or a mixture of a base of the alkali earth metal and a salt of the alkali earth metal in any ratio. Based on the quartz sand doped with the alkali earth metal element, the weight percentage of the alkali earth metal element is 400-2000ppm. The quartz crucible exhibits a longer durability, and it is not easy for the transparent coating layer on the inner surface to drop off and exfoliate when the crucible being used, which can produce no bad effect on the process of pulling the crystal. The dislocation-free proportion in grown silicon single crystal is large and the effect of pulling the crystal is excellent.

Description

(1) Technical field [0001] The invention relates to a quartz glass crucible, in particular to a quartz glass crucible used in the production of single crystal silicon by a pulling method, and a preparation method of the quartz glass crucible. (2) Background technology [0002] Quartz crucible is widely used as a container for holding polycrystalline silicon in the process of Czochralski monocrystalline silicon. Therefore, as an object in direct contact with monocrystalline silicon, quartz crucible determines the key factor for the smooth production of monocrystalline silicon. Among them, in the process of producing single crystal silicon by the Czochralski method, one of the main reasons for the failure of crystal pulling is that the cristobalite formed on the inner surface of the quartz glass crucible falls off and enters the molten silicon melt. [0003] At present, in the method to solve this problem, a crystallization accelerator containing alkaline earth metal is often ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): C30B15/10C03B20/00
CPCC03B19/095C30B15/10
Inventor 王春来周勇渥美崇
Owner ADVANCED QUARTZ MATERIAL (HANGZHOU) CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap