Novel multi-light-source multi-wavelength laser interference absolute range finder

Abstract

The invention discloses a novel multi-light-source multi-wavelength laser interference absolute range finder. The range finder comprises a laser source, a fixed planar mirror, a spectroscope, an interference measuring photoelectric detector and a movable reflector. The laser source comprises at least two laser source units. Each laser source unit emits a laser beam respectively. The wavelengths of the laser beams emitted by the laser source units are different. Multiple independent laser source units are adopted to form the laser source. The laser source thus has a simple structure and a low design difficulty level. The manufacturing, using and maintaining cost of the laser source is further lowered. Meanwhile, a photoelectric detection device is adopted to acquire the roughly measured distance of the movable reflector. The measuring efficiency is improved.

Description

technical field [0001] The invention relates to the field of precision testing technology and instruments, in particular to a novel multi-light source and multi-wavelength laser interference absolute range finder. Background technique [0002] The emergence of lasers has enabled the rapid development of ancient interferometric technology. Lasers have the characteristics of high brightness, good directionality, monochromaticity and good coherence. Laser interferometry technology has been relatively mature. Laser interferometry system is widely used: measurement of precision length and angle, such as detection of linear scale, grating, gauge block, and precision screw; positioning detection system in precision instruments, such as control and correction of precision machinery; special purpose for large-scale integrated circuits Positioning detection systems in equipment and testing instruments; measurement of tiny dimensions, etc. In most laser interferometric length measur...

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